Techniques for controlling a charged particle beam

• US 7,821,213 B2
• Filed: 10/01/2007
• Issued: 10/26/2010
• Est. Priority Date: 10/01/2007
• Status: Active Grant

• Current Assignee: Varian Semiconductor Equipment Associates Incorporated (Applied Materials Incorporated)
• Original Assignee: Varian Semiconductor Equipment Associates Incorporated (Applied Materials Incorporated)
• Inventors: Low, Russell J., Krause, Stephen E., Sinclair, Frank, Lubicki, Piotr R.
• Primary Examiner(s): Owens; Douglas W
• Assistant Examiner(s): Vu; Jimmy T
• Application Number:
  US11/865,336
• Publication Number:
  US 20090085504A1
• Time in Patent Office: 1,121 Days
• Field of Search: 315/5.42, 315500-507, 315/111.61, 204/176
• US Class Current: 315/505
• CPC Class Codes: H01J 2237/002 Cooling arrangements of objects being observed or treated H01J2237/2001
• CPC Class Codes: H01J 2237/04735 with electrostatic means
• CPC Class Codes: H01J 2237/304 Controlling tubes
• CPC Class Codes: H01J 37/08 Ion sources; Ion guns
• CPC Class Codes: H01J 37/3171 for ion implantation plasma immersion ion implantation H01J37/32412
• CPC Class Codes: H05H 7/04 Magnet systems , e.g. undulators, wigglers free-electron laser H01S3/0903; Energisation thereof

Abstract

Techniques for controlling a charged particle beam are disclosed. In one particular exemplary embodiment, the techniques may be realized as a charged particle acceleration/deceleration system. The charged particle acceleration/deceleration system may comprise an accelerator column, which may comprise a plurality of electrodes. The plurality of electrodes may have apertures through which a charged particle beam may pass. The charged particle acceleration/deceleration system may also comprise a voltage grading system. The voltage grading system may comprise a first fluid reservoir and a first fluid circuit. The first fluid circuit may have conductive connectors connecting to at least one of the plurality of electrodes. The voltage grading system may further comprise fluid in the first fluid circuit. The fluid may have an electrical resistance.

Claims

1. A charged particle acceleration/deceleration system comprising:

an accelerator column, the accelerator column comprising a plurality of electrodes having apertures through which a charged particle beam may pass; and

a voltage grading system, comprising;

a first fluid reservoir;

a first fluid circuit, the first fluid circuit having at least one conductive connector connecting to at least one of the plurality of electrodes; and

fluid in the first fluid circuit, the fluid having an electrical resistance.

2. The charged particle acceleration/deceleration system of claim 1, wherein the fluid is a fluid flow circulating through the first reservoir and the first fluid circuit.

3. The charged particle acceleration/deceleration system of claim 1, wherein the voltage grading system further comprises a fluid supply.

4. The charged particle acceleration/deceleration system of claim 1, wherein the voltage grading system further comprising an electrical resistance adjustor connected to the fluid.

5. The charged particle acceleration/deceleration system of claim 1, wherein the voltage grading system further comprising a second fluid reservoir.

6. The charged particle acceleration/deceleration system of claim 5, wherein the voltage grading system further comprises two uni-directional valves and a three-way valve, one of the two uni-directional valves connecting the first fluid reservoir to the first fluid circuit, the other of the two uni-directional valves connecting the second fluid reservoir to the first fluid circuit, the three-way valve connecting the fluid to the first fluid reservoir and the second fluid reservoir.

7. The charged particle acceleration/deceleration system of claim 6, wherein the fluid in the first fluid reservoir has a first electrical resistance value and the fluid in the second fluid reservoir has a second electrical resistance value.

8. The charged particle acceleration/deceleration system of claim 1, wherein the voltage grading system further comprises a second fluid circuit.

9. The charged particle acceleration/deceleration system of claim 8, wherein the voltage grading system further comprises two uni-directional valves and a three-way valve, one of the two uni-directional valves connecting the first fluid circuit to the fluid, the other of the two uni-directional valves connecting the second fluid circuit to the fluid, the three-way valve connecting the fluid to the first fluid circuit and the second fluid circuit.

10. The charged particle acceleration/deceleration system of claim 1, wherein the voltage grading system further comprises a resistivity monitor connected to the fluid.

11. The charged particle acceleration/deceleration system of claim 1, wherein the voltage grading system further comprises a pump connected to the fluid.

12. The charged particle acceleration/deceleration system of claim 1, wherein the fluid is de-ionized water.

13. The charged particle acceleration/deceleration system of claim 12, wherein the de-ionized water has additives to lower the resistance.

14. The charged particle acceleration/deceleration system of claim 12, wherein the de-ionized water is chilled.

15. The charged particle acceleration/deceleration system of claim 12, wherein the voltage grading system further comprises a deionization filter.

16. The charged particle acceleration/deceleration system of claim 1, wherein the voltage grading system further comprises at least one resistor connected between two of the plurality of electrodes.

17. A method for controlling a charged particle beam, the method comprising:

connecting a voltage grading system to an accelerator column, the accelerator column comprising a plurality of electrodes having apertures through which a charged particle beam may pass, the voltage grading system comprising a first fluid circuit with fluid, and the fluid having a electrical resistance value for a first mode of operation; and

adjusting the electrical resistance of the fluid to a different value for a second mode of operation.

18. The method of claim 17, wherein the fluid is a fluid flow circulating through the first fluid circuit.

19. The method of claim 18, wherein the voltage grading system further comprises a second fluid circuit.

20. The method of claim 19, further comprising switching the fluid flow to circulate through the second fluid circuit.

21. The method of claim 17, wherein the voltage grading system further comprises a electrical resistance adjustor, wherein adjusting the electrical resistance of the fluid to a different value comprises adding a conductive fluid solution to the fluid through the electrical resistance adjustor.

22. The method of claim 17, wherein the voltage grading system further comprises a first fluid reservoir and a second fluid reservoir, wherein adjusting the electrical resistance of the fluid to a different value comprises switching from the first fluid reservoir to the second fluid reservoir.

23. The method of claim 22, wherein the voltage grading system further comprises a third reservoir, wherein adjusting the electrical resistance of the fluid to a different value comprises mixing the fluid from the first and second reservoirs together in the third reservoir.

24. The method of claim 17, further comprising connecting at least one resistor between two of the plurality of electrodes.