In-situ absolute measurement process and apparatus for film thickness, film removal rate, and removal endpoint prediction

• US 7,821,655 B2
• Filed: 02/08/2005
• Issued: 10/26/2010
• Est. Priority Date: 02/09/2004
• Status: Expired due to Fees

• Current Assignee: Lam Research Corporation
• Original Assignee: Axcelis Technologies Incorporated
• Inventors: Janos, Alan, Saubhayana, Montien
• Primary Examiner(s): Chowdhury; Tarifur
• Assistant Examiner(s): PAJOOHI GOMEZ, TARA S
• Application Number:
  US11/053,731
• Publication Number:
  US 20060082785A1
• Time in Patent Office: 2,086 Days
• Field of Search: 356/630, 156/345, 1563451-34555, 438/9, 438/14, 438/16, 438/689, 396/611
• US Class Current: 356/630
• CPC Class Codes: G01B 11/0675 using interferometry
• CPC Class Codes: G03F 7/427 using plasma means only
• CPC Class Codes: H01J 37/32935 Monitoring and controlling tubes by information coming from the object and/or discharge
• CPC Class Codes: H01L 22/26 Acting in response to an ongoing measurement without interruption of processing, e.g. endpoint detection, in-situ thickness measurement endpoint detection arrangements in CMP apparatus B24B37/013, in discharge apparatus H01J37/32

Abstract

An apparatus and process for in-situ measurement of thin film thickness, ash rate, and end point generally include generating and measuring shallow angle interference patterns. The apparatus generally includes a chamber having a first viewing port and a second viewing port. The first viewing port includes receiving optics configured to receive light at a shallow angle from a surface of a substrate processed therein. The second port includes a broadband illumination source and is preferably disposed in a sidewall opposite the receiving optics. The process includes calculating the thin film thickness, ash rate, and end point from the interference patterns.

Claims

1. A wafer processing system, comprising:

a wafer processing chamber including a support for positioning at least one wafer within an interior region of the chamber, wherein the support comprises at least one temperature measuring device in thermal contact with the at least one wafer;

a source that routes a wafer treatment material into the processing chamber for removing a coating from an exposed surface of the at least one wafer;

an optical measuring apparatus including receiving optics in optical communication with the chamber, wherein the receiving optics are focused on or about a surface of the coating at a shallow angle and configured to detect an interference pattern associated with a wavelength spectrum, wherein the shallow angle is close to 90 degrees relative to the normal plane of the wafer such that radiation contributing to the interference pattern captured by the receiving optics has a localized origin;

a single external broadband illumination source disposed above the wafer and adapted to project broadband radiation into the chamber, wherein the single external broadband illumination source is the only illumination source; and

computing means in communication with the receiving optics for computing the film thickness, or the film removal rate, or the endpoint from the interference pattern or combinations thereof.

2. The wafer processing system of claim 1, wherein the broadband illumination system is a tungsten halogen lamp.

3. The wafer processing system of claim 1, further comprising a heating lamp array positioned below the at least one wafer.

4. The wafer processing system of claim 1, wherein the broadband illumination source is disposed in an opposing sidewall of the chamber relative to a location of the receiving optics.

5. The wafer processing system of claim 1, wherein the receiving optics comprise an array of fiber optic fibers having one end in optical communication with a diffraction grating of a spectrometer.

6. The wafer processing system of claim 1, further comprising a window intermediate the receiving optics and an interior region of the chamber.

7. The wafer processing system of claim 1, wherein the coating is a photoresist material.

8. The wafer processing system of claim 1, wherein the wafer treatment material comprises plasma of excited atomic species.

9. The wafer processing system of claim 1, further comprising a lens intermediate the receiving optics and an interior region of the wafer processing chamber.

10. The wafer processing system of claim 9, wherein the lens is a cylindrical lens with an equal radius of curvature at each end of the cylindrical lens.

11. The wafer processing system of claim 1, wherein the receiving optics in optical communication with the chamber is recessed from an interior region of the wafer processing chamber.

12. The wafer processing system of claim 1, wherein the single external broadband illumination source is plasma.