MEMS cooling device
First Claim
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1. A micro-electromechanical (MEMS) cooling device comprising:
- a first channel volume configured to transfer heat from a separate first device to a coolant;
a first inlet port and a first outlet port in fluid communication with the first channel volume;
a first MEMS micro-pump assembly comprising;
a first valve drive configured to move the coolant through the first channel volume, anda first valve assembly in fluid communication with the first channel volume and driven by the first valve drive;
a second channel volume configured to transfer heat from the separate first device or to the coolant;
a second inlet port and a second outlet port in fluid communication with the second channel volume; and
a second MEMS micro-pump assembly comprising;
a second valve drive configured to move the coolant through the second channel volume, anda second valve assembly in fluid communication with the second channel volume and driven by the second valve drive.
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Abstract
A preferred embodiment of the MEMS cooling device of the invention comprises one or more MEMS micro-channel volumes in communication with one or more MEMS micro-pump assemblies wherein each micro-pump assembly comprises a flexure valve, such as a leaf valve and means to drive a coolant through the channel volumes such as an electrostatic interleaved comb drive structure. A preferred embodiment comprises an inlet micro-pump assembly and an outlet micro-pump assembly but the device may also be fabricated with a single pump mechanism per channel volume.
24 Citations
33 Claims
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1. A micro-electromechanical (MEMS) cooling device comprising:
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a first channel volume configured to transfer heat from a separate first device to a coolant; a first inlet port and a first outlet port in fluid communication with the first channel volume; a first MEMS micro-pump assembly comprising; a first valve drive configured to move the coolant through the first channel volume, and a first valve assembly in fluid communication with the first channel volume and driven by the first valve drive; a second channel volume configured to transfer heat from the separate first device or to the coolant; a second inlet port and a second outlet port in fluid communication with the second channel volume; and a second MEMS micro-pump assembly comprising; a second valve drive configured to move the coolant through the second channel volume, and a second valve assembly in fluid communication with the second channel volume and driven by the second valve drive. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15)
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16. A micro-electromechanical (MEMS) cooling device comprising:
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a first channel volume and a second channel volume configured to transfer heat from a first device to a coolant; a first inlet port and a first outlet port in fluid communication with the first channel volume; a second inlet port and a second outlet port in fluid communication with the second channel volume; a first micro-pump assembly configured for pumping the coolant into the first channel volume and a second micro-pump assembly configured for pumping the coolant into the second channel volume; and a third micro-pump assembly configured for pumping the coolant out of the first channel volume and a fourth micro-pump assembly configured for pumping the coolant out of the second channel volume, wherein at least one of the first, second, third, or fourth micro-pump assemblies comprise; a valve drive disposed proximate the corresponding inlet port or the corresponding outlet port; and a valve assembly in fluid communication with the corresponding channel volume and wherein the valve assembly is driven by its corresponding valve drive. - View Dependent Claims (17, 18, 19, 20, 21, 22, 23, 24, 25, 26, 27, 28)
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29. A method for cooling a micro-electromechanical system (MEMS) device comprising:
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activating a first valve drive to open a first valve assembly of a first micro-pump assembly, wherein the first valve drive is in fluid communication with a first channel volume; activating a second valve drive to open a second valve assembly of a second micro-pump assembly, wherein the second valve drive is in fluid communication with a second channel volume; pumping a coolant through the first and second valve assemblies into the first and second channel volumes; activating a third valve drive to open a third valve assembly of a third micro-pump assembly, wherein the third valve drive is in fluid communication with the first channel volume; activating a fourth valve drive to open a fourth valve assembly of a fourth micro-pump assembly, wherein the fourth valve drive is in fluid communication with the second channel volume; and pumping the coolant through the third and fourth valve assemblies out of the first and second channel volumes. - View Dependent Claims (30, 31, 32, 33)
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Specification