Method and apparatus for semiconductor device and semiconductor memory device
First Claim
Patent Images
1. A method comprising:
- providing a first conductive region;
arranging a second conductive region adjacent to and insulated from the first conductive region by a dielectric region;
arranging a third region adjacent to and insulated from the second conductive region;
adjusting mechanical stress to at least one of the first conductive region and the second conductive region;
arranging a charge injection filter of the dielectric region between the first and the second conductive regions;
controlling transport of charge carriers of one polarity type from the first conductive region through the second conductive region to the third region using the charge injection filter; and
blocking transport of charge carriers of an opposite polarity type from the second conductive region to the first conductive region using the charge injection filter.
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Abstract
A method comprises providing a first conductive region, arranging a second conductive region adjacent to and insulated from the first conductive region by a dielectric region, arranging a third region adjacent to and insulated from the second conductive region, and adjusting mechanical stress to at least one of the first conductive region and the second conductive region.
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Citations
25 Claims
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1. A method comprising:
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providing a first conductive region; arranging a second conductive region adjacent to and insulated from the first conductive region by a dielectric region; arranging a third region adjacent to and insulated from the second conductive region; adjusting mechanical stress to at least one of the first conductive region and the second conductive region; arranging a charge injection filter of the dielectric region between the first and the second conductive regions; controlling transport of charge carriers of one polarity type from the first conductive region through the second conductive region to the third region using the charge injection filter; and blocking transport of charge carriers of an opposite polarity type from the second conductive region to the first conductive region using the charge injection filter. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16)
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17. A method comprising:
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providing a first conductive region having charge carriers for ballistic transport; arranging a second conductive region adjacent to and insulated from the first conductive region to control the ballistic transport of the charge carriers; arranging a third region adjacent to and insulated from the second conductive region, wherein the third region receives the charge carriers with an injection efficiency for the ballistic transport; adjusting mechanical stress in at least one of the first conductive region and the second conductive region to enhance the injection efficiency of a ballistic transport; arranging a charge injection filter of a dielectric region between the first and the second conductive regions; controlling transport of charge carriers of one polarity type from the first conductive region through the second conductive region to the third region using the charge injection filter; and blocking transport of charge carriers of an opposite polarity type from the second conductive region to the first conductive region using the charge injection filter. - View Dependent Claims (18, 19, 20, 21, 22)
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23. A method comprising:
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providing a first conductive region having a population of charge carriers; arranging a second conductive region adjacent to and insulated from the first conductive region for controlling transport of charge carriers from the first conductive region; arranging a third region adjacent to and insulated from the second conductive region, wherein the third region receives the charge carriers; adjusting mechanical stress in at least one of the first conductive region and the second conductive region; arranging a charge injection filter of a dielectric region between the first and the second conductive regions; controlling transport of charge carriers of one polarity type from the first conductive region through the second conductive region to the third region using the charge injection filter; and blocking transport of charge carriers of an opposite polarity type from the second conductive region to the first conductive region using the charge injection filter. - View Dependent Claims (24, 25)
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Specification