Device and method for modifying actuation voltage thresholds of a deformable membrane in an interferometric modulator
First Claim
1. A method for modulating electromagnetic radiation, comprising:
- providing a plurality of micromechanical devices, each device comprising;
a conductor layer; and
a reflective layer parallel to and spaced a distance from the conductor layer while in a relaxed state, the reflective layer configured to move relative to the conductor layer upon being switched to an actuated state, wherein the distance for some of the plurality of micromechanical devices is different from other of the plurality of micromechanical devices,wherein at least the some of the plurality of micromechanical devices comprises a charged layer between the conductor layer and the reflective layer, the charged layer having an incorporated charged species; and
applying a voltage to the conductor layers and the reflective layers of the micromechanical devices to actuate the micromechanical devices.
4 Assignments
0 Petitions
Accused Products
Abstract
By varying the spacing between a partially-reflective, partially-transmissive surface and a highly reflective surface positioned behind the partially-reflective, partially-transmissive surface, an interferometric modulator selectively creates constructive and/or destructive interference between light waves reflecting off the two surfaces. The spacing can be varied by applying a voltage to create electrostatic attraction between the two surfaces, which causes one or both surfaces to deform and move closer together. In the absence of such attraction, the surfaces are in a relaxed position, where they are farther apart from one another. A actuation voltage is needed to create sufficient electrostatic attraction to cause a surface to deform. The actuation voltage can be modified by implanting ions in a dielectric layer attached to one or both surfaces. Upon the application of a voltage, the ions create a baseline level of repulsion or attraction between the two surfaces, which thus require more or less voltage, respectively, to cause a surface to deform. The degree of ion implantation can be chosen to set the actuation voltage as desired, or the surfaces can be made to deform at a given voltage by appropriately selecting the degree of ion implantation.
-
Citations
21 Claims
-
1. A method for modulating electromagnetic radiation, comprising:
-
providing a plurality of micromechanical devices, each device comprising; a conductor layer; and a reflective layer parallel to and spaced a distance from the conductor layer while in a relaxed state, the reflective layer configured to move relative to the conductor layer upon being switched to an actuated state, wherein the distance for some of the plurality of micromechanical devices is different from other of the plurality of micromechanical devices, wherein at least the some of the plurality of micromechanical devices comprises a charged layer between the conductor layer and the reflective layer, the charged layer having an incorporated charged species; and applying a voltage to the conductor layers and the reflective layers of the micromechanical devices to actuate the micromechanical devices. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21)
-
Specification