Impulse actuated MEMS devices
First Claim
1. An impulse actuated shutter, comprising:
- a shutter blade, comprising a blade disposed at a first end of a flexure and having an opposite second end fixed so as to constrain the blade to move along a first trajectory and between opposite initial and final blade positions;
an actuator, comprising a stator and a stage supported for movement relative to the stator along a second trajectory intersecting at least the initial blade position of the blade trajectory and between opposite initial and final stage positions; and
,a mechanism for accelerating the stage along the second trajectory and against the blade such that at least some of the momentum of the stage is imparted to the blade and causes the blade to move away from the stage, along the first trajectory, and from the initial blade position to the final blade position.
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Accused Products
Abstract
An impulse actuated mechanism for, e.g., a digital camera shutter, includes a shutter blade disposed at a first end of a flexure having an opposite second end fixed so as to constrain the blade to move along a planar, relatively long, first trajectory between opposite initial and final blade positions, and a short-throw, high force blade actuator that includes a stator and a stage supported for movement relative to the stator and along a second trajectory intersecting the initial blade position, and a mechanism for accelerating the stage along the second trajectory and against the blade such that at least some of the momentum of the stage is imparted to the blade, causing the blade to move along the first trajectory from the initial blade position to the final blade position, where it blocks the passage of light through a light aperture of the camera.
19 Citations
21 Claims
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1. An impulse actuated shutter, comprising:
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a shutter blade, comprising a blade disposed at a first end of a flexure and having an opposite second end fixed so as to constrain the blade to move along a first trajectory and between opposite initial and final blade positions; an actuator, comprising a stator and a stage supported for movement relative to the stator along a second trajectory intersecting at least the initial blade position of the blade trajectory and between opposite initial and final stage positions; and
,a mechanism for accelerating the stage along the second trajectory and against the blade such that at least some of the momentum of the stage is imparted to the blade and causes the blade to move away from the stage, along the first trajectory, and from the initial blade position to the final blade position. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13)
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14. An impulse actuated MEMS shutter, comprising:
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a shutter, comprising a planar blade integrally formed at a first end of an elongated, resilient, planar flexure and having an opposite second end fixed so as to constrain the blade to move along a planar, arcuate first trajectory and between opposite initial and final blade positions; an actuator, comprising a planar stator and a planar stage supported above the stator for parallel movement relative to the stator along a second trajectory coplanar with the blade and between opposite initial and final stage positions, each of the stator and the stage having a plurality of planar electrodes disposed on respective opposing surfaces thereof; and
,a mechanism for selectably applying electrostatic charges of opposite polarities to the respective electrodes on the opposing surfaces of the stator and the stage such that the stage is accelerated along the second trajectory and against the blade, at least some of the momentum of the stage is imparted to the blade, and the blade moves away from the stage, along the first trajectory, from the initial blade position to the final blade position and obscures a light aperture located adjacent to the final blade position. - View Dependent Claims (15, 16, 17, 18)
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19. A digital camera, comprising:
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an array of photosensitive pixels; optics, including a light aperture, disposed in front of the array and operable to admit light from a subject onto the array; and
,an impulse actuated shutter mechanism, comprising; a shutter blade, comprising a blade disposed at a first end of a flexure and having an opposite second end fixed so as to constrain the blade to move along a first trajectory and between opposite initial and final blade positions; an actuator, comprising a stator and a stage supported for movement relative to the stator along a second trajectory intersecting at least the initial blade position of the blade trajectory and between opposite initial and final stage positions; and
,a mechanism for accelerating the stage along the second trajectory and against the blade such that at least some of the momentum of the stage is imparted to the blade and causes the blade to move away from the stage, along the first trajectory, and from the initial blade position to the final blade position. - View Dependent Claims (20, 21)
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Specification