Support structures for free-standing electromechanical devices
First Claim
Patent Images
1. An electromechanical device comprising:
- a functional layer comprising a first material;
a deformable layer comprising a second material different from the first material; and
a connecting element comprising the first material, the connecting element mechanically coupled to the deformable layer and the functional layer, wherein the connecting element and the deformable layer form an interface between the first material and the second material, the interface spaced from the functional layer, wherein the interface is on a side of the deformable layer opposite the functional layer.
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Abstract
A microelectromechanical (MEMS) device includes a functional layer including a first material, a deformable layer including a second material different from the first material, and a connecting element including the first material. The connecting element is mechanically coupled to the deformable layer and the functional layer. The connecting element and the deformable layer form an interface between the first material and the second material. The interface is spaced from the functional layer.
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Citations
36 Claims
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1. An electromechanical device comprising:
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a functional layer comprising a first material; a deformable layer comprising a second material different from the first material; and a connecting element comprising the first material, the connecting element mechanically coupled to the deformable layer and the functional layer, wherein the connecting element and the deformable layer form an interface between the first material and the second material, the interface spaced from the functional layer, wherein the interface is on a side of the deformable layer opposite the functional layer. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16)
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17. An electromechanical device comprising:
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a functional layer comprising a first material; a deformable layer comprising a second material different from the first material; and a connecting element comprising the first material, the connecting element mechanically coupled to the deformable layer and the functional layer, wherein the connecting element and the deformable layer form an interface between the first material and the second material, the interface spaced from the functional layer, wherein the interface is on a side of the deformable layer so that the deformable layer is between the interface and the functional layer. - View Dependent Claims (18, 19, 20, 21, 22, 23, 24, 25, 32)
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26. An electromechanical device comprising:
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a functional layer comprising a first material; a deformable layer comprising a second material different from the first material, the deformable layer electrically connected to the functional layer; and a connecting element comprising the first material, the connecting element mechanically coupled to the deformable layer and the functional layer, wherein the connecting element and the deformable layer form an interface between the first material and the second material, the interface spaced from the functional layer, wherein the interface is on a side of the deformable layer opposite the functional layer. - View Dependent Claims (27, 28, 29, 30, 31, 33, 34, 35, 36)
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Specification