Mircromirror device having a vertical hinge
First Claim
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1. A mirror device, comprising:
- a plurality of electrodes disposed on a substrate for applying voltages thereon to generate an electrostatic force to deflect mirrors of said mirror device wherein at least one of the electrodes is disposed inside the substrate under a top surface of said substrate for applying of a first voltage thereon and other electrodes are disposed on top of said top surface of said the substrate for applying voltages thereon independent from the first voltage.
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Abstract
A mirror device comprises: a plurality of electrodes disposed on a substrate; a hinge connected to at least one of the electrodes; a mirror connected to the hinge and corresponding to at least one of the electrodes, wherein a barrier layer is comprised between the hinge and mirror, and/or between the hinge and electrode. Also noted is a mirror device production method for producing such-configured mirror device. Further noted is a projection apparatus comprising such-configured mirror device.
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Citations
4 Claims
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1. A mirror device, comprising:
a plurality of electrodes disposed on a substrate for applying voltages thereon to generate an electrostatic force to deflect mirrors of said mirror device wherein at least one of the electrodes is disposed inside the substrate under a top surface of said substrate for applying of a first voltage thereon and other electrodes are disposed on top of said top surface of said the substrate for applying voltages thereon independent from the first voltage. - View Dependent Claims (2, 3, 4)
Specification
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Current AssigneeIgnite USA (Ignite)
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Original AssigneeOlympus Corporation, Silicon Quest Kabushiki-Kaisha
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InventorsMaeda, Yoshihiro, Sugimoto, Naoya, Ichikawa, Hirotoshi, Ishii, Fusao
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Primary Examiner(s)Choi; William C
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Application NumberUS11/894,248Publication NumberTime in Patent Office1,186 DaysField of Search359/198, 359/214, 359/223, 359/224, 359/290, 359/295, 359/298, 359/198.1, 359/199.2, 359/200.6, 359/224.1US Class Current359/295CPC Class CodesG02B 26/0833 the reflecting element bein...
