Interdigitated chemical sensors, and methods of making and using the same
First Claim
1. A sensing electrode pair, comprising:
- a. a substrate;
b. a pair of spaced sensing electrodes elevated above the substrate, wherein one of the electrodes of the electrode pair is a drive electrode and the other electrode of the electrode pair is a sense electrode in electrical communication with the drive electrode, and wherein each of the drive electrode and sense electrode is elevated above the substrate by at least one post disposed between the substrate and the electrode so as to space the electrode from an upper surface of the substrate;
c. a shield layer disposed on the upper surface of the substrate and underlying the post(s) elevating the electrodes; and
d. a chemical sensing material disposed on at least a portion of at least one of the drive electrode and sense electrode of the electrode pair, wherein the chemical sensing material is responsive to a target analyte.
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Accused Products
Abstract
The present invention relates to the field of chemical detection. More specifically, the invention provides devices that can detect various target analytes (e.g., chemicals and/or biological materials) present in an environment by adsorption or absorption of the target analyte(s) to or in a chemical sensing material such that an electrical parameter (e.g., capacitance, resistance, etc.) of the chemical sensing material is altered in a manner detectable by circuitry associated with the sensing electrode pair coated with the chemical sensing material. Here, the sensing electrode pair(s) of the devices of the invention are suspended over an inert substrate via one or more posts used to space the electrodes from the substrate.
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Citations
16 Claims
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1. A sensing electrode pair, comprising:
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a. a substrate; b. a pair of spaced sensing electrodes elevated above the substrate, wherein one of the electrodes of the electrode pair is a drive electrode and the other electrode of the electrode pair is a sense electrode in electrical communication with the drive electrode, and wherein each of the drive electrode and sense electrode is elevated above the substrate by at least one post disposed between the substrate and the electrode so as to space the electrode from an upper surface of the substrate; c. a shield layer disposed on the upper surface of the substrate and underlying the post(s) elevating the electrodes; and d. a chemical sensing material disposed on at least a portion of at least one of the drive electrode and sense electrode of the electrode pair, wherein the chemical sensing material is responsive to a target analyte. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16)
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Specification