Method and device for multistate interferometric light modulation
First Claim
1. A method of driving a MEMS device comprising a first electrode, a second electrode, and a movable electrode positioned between the first electrode and the second electrode and configured to move to at least two positions therebetween, the method comprising, the method comprising:
- applying a first voltage potential difference between the first electrode and the movable electrode so as to drive the movable electrode to a position substantially in contact with a dielectric layer, wherein an attractive force is created between the movable electrode and the dielectric layer;
applying a second voltage potential difference between the first electrode and the movable electrode and a third voltage potential difference between the second electrode and the movable electrode so as to overcome the attractive force between the movable electrode and the dielectric layer and to drive the movable electrode away from the dielectric layer.
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Accused Products
Abstract
A multi-state light modulator comprises a first reflector. A first electrode is positioned at a distance from the first reflector. A second reflector is positioned between the first reflector and the first electrode. The second reflector is movable between an undriven position, a first driven position, and a second driven position, each having a corresponding distance from the first reflector. In one embodiment, the three positions correspond to reflecting white light, being non-reflective, and reflecting a selected color of light. Another embodiment is a method of making the light modulator. Another embodiment is a display including the light modulator.
212 Citations
27 Claims
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1. A method of driving a MEMS device comprising a first electrode, a second electrode, and a movable electrode positioned between the first electrode and the second electrode and configured to move to at least two positions therebetween, the method comprising, the method comprising:
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applying a first voltage potential difference between the first electrode and the movable electrode so as to drive the movable electrode to a position substantially in contact with a dielectric layer, wherein an attractive force is created between the movable electrode and the dielectric layer; applying a second voltage potential difference between the first electrode and the movable electrode and a third voltage potential difference between the second electrode and the movable electrode so as to overcome the attractive force between the movable electrode and the dielectric layer and to drive the movable electrode away from the dielectric layer. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9)
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10. An electromechanical (MEMS) display device, comprising:
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a first reflector; a first electrode; a second electrode positioned at a distance from the first reflector, wherein the first reflector is disposed between the first electrode and the second electrode; and a second reflector positioned between the first reflector and the second electrode, the second reflector being selectively movable to each of an undriven position, a first position, and a second position, wherein the first position is closer to the first reflector than is the undriven position, wherein the second position is farther from the first reflector than is the undriven position, wherein the second reflector moves to the first position in response to a first voltage potential applied between the first electrode and the second reflector, and wherein the second reflector moves to the second position in response to a second voltage potential applied between the second electrode and the second reflector, wherein the first and second reflector are configured to selectively output light indicative of at least a portion of an image based on the position of the second reflector. - View Dependent Claims (11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24, 25, 26, 27)
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Specification