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Micromirror device with a single address electrode

  • US 7,839,561 B2
  • Filed: 02/25/2008
  • Issued: 11/23/2010
  • Est. Priority Date: 02/26/2007
  • Status: Active Grant
First Claim
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1. A micromirror device, comprising:

  • a plurality of mirrors arranged on a substrate;

    an elastic hinge constituting a hinge electrode for supporting each of said mirrors to deflect to a plurality of directions;

    a single address electrode for each of said mirrors, wherein each of said mirrors has a first region and a second regions across a deflection axis of each of said mirrors; and

    a driving circuit connected to said single address electrodewhereby said address electrode is applied a driving voltage and controls each of said mirrors to deflect in two opposite directions across a deflection axis of each of the mirrors.

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