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MEMS controlled oscillator

  • US 7,843,283 B2
  • Filed: 11/09/2006
  • Issued: 11/30/2010
  • Est. Priority Date: 11/09/2005
  • Status: Expired due to Fees
First Claim
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1. A device comprising:

  • an array of microelectromechanical resonators having a variety of resonant frequencies, each resonator having a separate actuator that causes the resonator to resonate at its resonant frequency;

    an exciter to drive the actuators to cause the resonators in the array to resonate at their own resonant frequencies, wherein each resonator is to couple to an antenna to transmit and receive signals.

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