MEMS controlled oscillator
First Claim
1. A device comprising:
- an array of microelectromechanical resonators having a variety of resonant frequencies, each resonator having a separate actuator that causes the resonator to resonate at its resonant frequency;
an exciter to drive the actuators to cause the resonators in the array to resonate at their own resonant frequencies, wherein each resonator is to couple to an antenna to transmit and receive signals.
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Accused Products
Abstract
An array of micromechanical oscillators have different resonant frequencies based on their geometries. In one embodiment, a micromechanical oscillator has a resonant frequency defined by an effective spring constant that is modified by application of heat. In one embodiment, the oscillator is disc of material supported by a pillar of much smaller diameter than the disc. The periphery of the disc is heated to modify the resonant frequency (or equivalently the spring constant or stiffness) of the disc. Continuous control of the output phase and frequency may be achieved when the oscillator becomes synchronized with an imposed sinusoidal force of close frequency. The oscillator frequency can be detuned to produce an easily controlled phase differential between the injected signal and the oscillator feedback. A phased array radar may be produced using independent phase controllable oscillators.
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Citations
25 Claims
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1. A device comprising:
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an array of microelectromechanical resonators having a variety of resonant frequencies, each resonator having a separate actuator that causes the resonator to resonate at its resonant frequency; an exciter to drive the actuators to cause the resonators in the array to resonate at their own resonant frequencies, wherein each resonator is to couple to an antenna to transmit and receive signals. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12)
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13. A device comprising:
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an array of microelectromechanical resonators having a variety of resonant frequencies, each resonator having an actuator that causes the resonator to resonate at its resonant frequency, wherein the resonators include resistive heaters; and an antenna coupled to the array.
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14. A device comprising:
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an array of microelectromechanical resonators having different resonant frequencies within a desired range of frequencies; a resistive heater coupled to each resonator to cause the resonators to resonate; and an antenna coupled to the resonators. - View Dependent Claims (15, 16, 17, 18, 19, 20, 21)
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22. A device comprising:
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an array of microelectromechanical resonators having different resonant frequencies within a desired range of frequencies; a separate actuator associated with each resonator to cause the resonators to resonate; an exciter to drive the separate actuators; and a detector associated with each resonator to detect the frequency of resonation of the associated resonators. - View Dependent Claims (23, 24)
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25. A device comprising:
an array of microelectromechanical resonators having a variety of resonant frequencies, each resonator having an actuator that causes the resonator to resonate at its resonant frequency; lasers for selectively heating the resonators; and an antenna coupled to the array.
Specification