Non-volatile memory devices including stacked NAND-type resistive memory cell strings and methods of fabricating the same
First Claim
1. A non-volatile memory device, comprising:
- a substrate;
an insulating layer on the substrate;
a plurality of serially connected resistive memory cells stacked in the insulating layer such that a first one of the plurality of resistive memory cells is on the substrate and a next one of the plurality of resistive memory cells is on the first one of the plurality of resistive memory cells to define a NAND-type resistive memory cell string; and
a bit line on the insulating layer and electrically connected to a last one of the plurality of resistive memory cells,wherein at least one of the plurality of resistive memory cells comprises;
a switching device including a body pattern comprising a source region, a channel region, and a drain region stacked in the insulating layer, and a gate electrode on a sidewall of the body pattern; and
a data storage element connected in parallel with the switching device, the data storage element comprising a lower electrode spaced apart from the body pattern of the switching device, a variable resistor on the lower electrode, and an upper electrode on the variable resistor,wherein the upper electrode of the first one of the plurality of resistive memory cells is on the lower electrode and the body pattern of the next one of the plurality of resistive memory cells in the NAND type memory cell string.
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Accused Products
Abstract
A non-volatile memory device includes a substrate, an insulating layer on the substrate, and a plurality of serially connected resistive memory cells stacked in the insulating layer such that a first one of the plurality of resistive memory cells is on the substrate and a next one of the plurality of resistive memory cells is on the first one of the plurality of resistive memory cells to define a NAND-type resistive memory cell string. A bit line on the insulating layer is electrically connected to a last one of the plurality of resistive memory cells. At least one of the plurality of resistive memory cells may include a switching device and a data storage element including a variable resistor connected in parallel with the switching device. Related devices and fabrication methods are also discussed.
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Citations
23 Claims
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1. A non-volatile memory device, comprising:
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a substrate; an insulating layer on the substrate; a plurality of serially connected resistive memory cells stacked in the insulating layer such that a first one of the plurality of resistive memory cells is on the substrate and a next one of the plurality of resistive memory cells is on the first one of the plurality of resistive memory cells to define a NAND-type resistive memory cell string; and a bit line on the insulating layer and electrically connected to a last one of the plurality of resistive memory cells, wherein at least one of the plurality of resistive memory cells comprises; a switching device including a body pattern comprising a source region, a channel region, and a drain region stacked in the insulating layer, and a gate electrode on a sidewall of the body pattern; and a data storage element connected in parallel with the switching device, the data storage element comprising a lower electrode spaced apart from the body pattern of the switching device, a variable resistor on the lower electrode, and an upper electrode on the variable resistor, wherein the upper electrode of the first one of the plurality of resistive memory cells is on the lower electrode and the body pattern of the next one of the plurality of resistive memory cells in the NAND type memory cell string. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9)
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10. A non-volatile memory device, comprising:
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a substrate; an insulating layer on the substrate; a plurality of serially connected resistive memory cells stacked in the insulating layer such that a first one of the plurality of resistive memory cells is on the substrate and a next one of the plurality of resistive memory cells is on the first one of the plurality of resistive memory cells to define a NAND-type resistive memory cell string; and a bit line on the insulating layer and electrically connected to a last one of the plurality of resistive memory cells, wherein at least one of the plurality of resistive memory cells comprises; a switching device including a body pattern comprising a source region, a channel region, and a drain region stacked in the insulating layer, and a gate electrode on a sidewall of the body pattern; a variable resistor spaced apart from the switching device; and an upper electrode on the variable resistor and the drain region of the switching device, and wherein the upper electrode of the first one of the plurality of resistive memory cells electrically connects the variable resistor and the drain region of the first one of the plurality of resistive memory cells with the variable resistor and the source region of the next one of the plurality of resistive memory cells in the NAND-type resistive memory cell string. - View Dependent Claims (11, 12)
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13. A method of fabricating a non-volatile memory device, the method comprising:
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forming an insulating layer on a substrate; forming a plurality of serially connected resistive memory cells stacked in the insulating layer such that a first one of the plurality of resistive memory cells is on the substrate and a next one of the plurality of resistive memory cells is on the first one of the plurality of resistive memory cells to define NAND-type resistive memory cell string; and forming a bit line on the insulating layer and electrically connected to a last one of the plurality of resistive memory cells, wherein forming at least one of the plurality of resistive memory cells comprises; forming an interlayer insulating layer on the substrate; forming a switching device in the interlayer insulating layer including a body pattern comprising a source region, a channel region, and a drain region stacked in the interlayer insulating layer; and forming a data storage element in the interlayer insulating later and electrically connected between the source region and the drain region of the switching device, wherein forming the switching device comprises; patterning the interlayer insulating layer to define an opening therein; forming the body pattern in the opening in the interlayer insulating layer; implanting impurity ions into the body pattern to define the source region, the channel region, and the drain region stacked in the opening in the interlayer insulating layer; and forming a gate electrode on a sidewall of the body pattern. - View Dependent Claims (14, 15)
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16. A method of fabricating a non-volatile memory device, the method comprising:
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forming an insulating layer on a substrate; forming a plurality of serially connected resistive memory cells stacked in the insulating layer such that a first one of the plurality of resistive memory cells is on the substrate and a next one of the plurality of resistive memory cells is on the first one of the plurality of resistive memory cells to define NAND-type resistive memory cell string; and forming a bit line on the insulating layer and electrically connected to a last one of the plurality of resistive memory cells, wherein forming at least one of the plurality of resistive memory cells comprises; forming an interlayer insulating layer on the substrate; forming a switching device in the interlayer insulating layer including a body pattern comprising a source region, a channel region, and a drain region stacked in the interlayer insulating layer; and forming a data storage element in the interlayer insulating later and electrically connected between the source region and the drain region of the switching device, wherein forming the data storage element comprises; forming an opening extending through the interlayer insulating layer; forming a lower electrode in the opening; forming a variable resistor on the lower electrode; and forming an upper electrode on the variable resistor, wherein the upper electrode of the first one of the plurality of resistive memory cells is on the lower electrode and the body pattern of the next one of the plurality of resistive memory cells in the NAND-type resistive memory cell string. - View Dependent Claims (17, 18, 19, 20)
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21. A method of fabricating a non-volatile memory device, the method comprising:
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forming an insulating layer on a substrate; forming a plurality of serially connected resistive memory cells stacked in the insulating layer such that a first one of the plurality of resistive memory cells is on the substrate and a next one of the plurality of resistive memory cells is on the first one of the plurality of resistive memory cells to define NAND-type resistive memory cell string; and forming a bit line on the insulating layer and electrically connected to a last one of the plurality of resistive memory cells, wherein forming at least one of the plurality of resistive memory cells comprises; forming an interlayer insulating layer on the substrate; forming a switching device in the interlayer insulating layer including a body pattern comprising a source region, re ion, a channel region, and a drain region stacked in the interlayer insulating layer; and forming a data storage element in the interlayer insulating later and electrically connected between the source region and the drain region of the switching device, wherein forming the data storage element comprises; forming a contact hole extending through the interlayer insulating layer; forming a variable resistor in the hole; and forming an upper electrode on the variable resistor and the body pattern. - View Dependent Claims (22, 23)
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Specification