Composite sensor
First Claim
1. A composite sensor, comprising:
- an external holding portion;
an internal holding portion supported within said external holding portion via a coupling portion; and
a vibration angular velocity sensor element and an acceleration sensor element disposed within said internal holding portion,wherein said internal holding portion is held in such a manner so as to substantially suppress relative movement between said external holding portion and said internal holding portion along a direction in which said acceleration sensor element detects acceleration, while allowing relative movement between said external holding portion and said internal holding portion along a direction in which said vibration angular velocity sensor element receives Coriolis force at least by an angular velocity, so as to be able to absorb disturbance which would affect said vibration angular velocity sensor element.
2 Assignments
0 Petitions
Accused Products
Abstract
A composite sensor includes an external holding portion, an internal holding portion supported within the external holding portion via coupling portion, and a vibration-type angular velocity sensor element and an acceleration sensor element disposed within the internal holding portion, and is configured so that the internal holding portion is held in such a manner so as to substantially suppress a movement of the acceleration sensor element along a detection direction while to allow a movement of the vibration-type angular velocity sensor element in a direction in which it receives Coriolis force at least by an angular velocity. A reduction of the composite sensor in size can be achieved by this structure.
12 Citations
12 Claims
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1. A composite sensor, comprising:
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an external holding portion; an internal holding portion supported within said external holding portion via a coupling portion; and a vibration angular velocity sensor element and an acceleration sensor element disposed within said internal holding portion, wherein said internal holding portion is held in such a manner so as to substantially suppress relative movement between said external holding portion and said internal holding portion along a direction in which said acceleration sensor element detects acceleration, while allowing relative movement between said external holding portion and said internal holding portion along a direction in which said vibration angular velocity sensor element receives Coriolis force at least by an angular velocity, so as to be able to absorb disturbance which would affect said vibration angular velocity sensor element. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12)
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Specification