Valve door with ball coupling
First Claim
1. A chamber comprising:
- a chamber body having a first substrate access port;
a door member having a sealing face positionable to selectively seal the first substrate access port;
a first lever arm having a first end coupled to a first shaft disposed through the chamber body;
a first ball joint connecting a second end of the first lever arm to the door member;
a second ball joint; and
a second lever arm having a first end coupled to a second shaft disposed through the chamber body, and a second end coupled to the door member by the second ball joint, wherein the first ball joint and the second ball joint allow rotation of the door member around at least two axes.
1 Assignment
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Accused Products
Abstract
Embodiments of an apparatus for sealing a substrate transfer passage in a chamber are provided. In one embodiment, an apparatus for sealing a substrate transfer passage in a chamber includes an elongated door member coupled to an actuator by a ball joint. The ball joint is configured to allow movement of the door member relative to the lever arm around a center of the ball joint. In one embodiment, a sealing face of the elongated door is curved. In another embodiment, the chamber is one of a chemical vapor deposition chamber, a load lock chamber, a metrology chamber, a thermal processing chamber, or a physical vapor disposition chamber, a load lock chamber, a substrate transfer chamber or a vacuum chamber.
178 Citations
13 Claims
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1. A chamber comprising:
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a chamber body having a first substrate access port; a door member having a sealing face positionable to selectively seal the first substrate access port; a first lever arm having a first end coupled to a first shaft disposed through the chamber body; a first ball joint connecting a second end of the first lever arm to the door member; a second ball joint; and a second lever arm having a first end coupled to a second shaft disposed through the chamber body, and a second end coupled to the door member by the second ball joint, wherein the first ball joint and the second ball joint allow rotation of the door member around at least two axes. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13)
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Specification