Radiation imaging device
First Claim
1. A radiation imaging device, comprising:
- a phosphor film that emits light by absorbing radiation transmitted through an imaging target;
a photoelectric conversion portion that includes an upper electrode, a lower electrode, and a photoelectric conversion film disposed between the upper and lower electrodes, the photoelectric conversion film containing an organic photoelectric conversion material that absorbs light emitted from the phosphor film;
a signal output portion that includes a field effect thin film transistor having an active layer formed from an amorphous oxide and that outputs a signal corresponding to electric charges generated by the photoelectric conversion portion; and
a substrate on which the signal output portion, the photoelectric conversion portion and the phosphor film are formed in this order, whereina plurality of pixel portions are arranged on the substrate, each of which is made up of a part of the signal output portion, the photoelectric conversion portion and the phosphor film, and the respective parts of the signal output portion and the photoelectric conversion portion in each of the pixel portions are formed so as to have an overlapping portion in a thickness direction.
1 Assignment
0 Petitions
Accused Products
Abstract
A radiation imaging device 12 has a phosphor film 8; a photoelectric conversion portion 13 including an upper electrode 6, a lower electrode 2, and a photoelectric conversion film 4 disposed between the electrodes; a signal output portion 14 including a field effect thin film transistor 10 having an active layer 24 formed from an amorphous oxide and that outputs a signal corresponding to electric charges generated by the photoelectric conversion portion; and a substrate 1 on which the signal output portion, the photoelectric conversion portion and the phosphor film are formed in this order. Each of pixel portions is made up of the signal output portion, the photoelectric conversion portion and the phosphor film, and the signal output portion and the photoelectric conversion portion in each of the pixel portions are formed so as to have an overlapping portion in a thickness direction.
24 Citations
14 Claims
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1. A radiation imaging device, comprising:
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a phosphor film that emits light by absorbing radiation transmitted through an imaging target; a photoelectric conversion portion that includes an upper electrode, a lower electrode, and a photoelectric conversion film disposed between the upper and lower electrodes, the photoelectric conversion film containing an organic photoelectric conversion material that absorbs light emitted from the phosphor film; a signal output portion that includes a field effect thin film transistor having an active layer formed from an amorphous oxide and that outputs a signal corresponding to electric charges generated by the photoelectric conversion portion; and a substrate on which the signal output portion, the photoelectric conversion portion and the phosphor film are formed in this order, wherein a plurality of pixel portions are arranged on the substrate, each of which is made up of a part of the signal output portion, the photoelectric conversion portion and the phosphor film, and the respective parts of the signal output portion and the photoelectric conversion portion in each of the pixel portions are formed so as to have an overlapping portion in a thickness direction. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14)
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Specification