Electrostatic chuck with heater
First Claim
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1. An electrostatic chuck with a heater, comprising:
- a base which is composed of a sintered body containing alumina;
an electrode disposed in an upper part of the base; and
a resistance heating element embedded in a lower part of the base, the base including a dielectric layer between the electrode and an upper surface of the base and a supporting member between the electrode and a lower surface of the base, whereinthe dielectric layer has a carbon content of not more than 100 ppm, and the supporting member has a carbon content of 0.03 to 0.25 wt %, andthe resistance heating element is formed into a coil and mainly composed of niobium.
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Abstract
An electrostatic chuck with a heater including: a base which is composed of a sintered body containing alumina, an electrode disposed in an upper part of the base, and a resistance heating element embedded in a lower part of the base. The base includes a dielectric layer between the electrode and an upper surface of the base and a supporting member between the electrode and a lower surface of the base. The dielectric layer has a carbon content of not more than 100 ppm, and the supporting member has a carbon content of 0.03 to 0.25 wt %. Moreover, the resistance heating element is formed into a coil and mainly composed of niobium.
20 Citations
2 Claims
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1. An electrostatic chuck with a heater, comprising:
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a base which is composed of a sintered body containing alumina; an electrode disposed in an upper part of the base; and a resistance heating element embedded in a lower part of the base, the base including a dielectric layer between the electrode and an upper surface of the base and a supporting member between the electrode and a lower surface of the base, wherein the dielectric layer has a carbon content of not more than 100 ppm, and the supporting member has a carbon content of 0.03 to 0.25 wt %, and the resistance heating element is formed into a coil and mainly composed of niobium. - View Dependent Claims (2)
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Specification
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Current AssigneeNGK Insulators Limited
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Original AssigneeNGK Insulators Limited
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InventorsKawajiri, Tetsuya, Nobori, Kazuhiro, Hattori, Akiyoshi
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Primary Examiner(s)Jackson; Stephen W
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Assistant Examiner(s)BAUER, SCOTT ALLEN
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Application NumberUS11/777,318Publication NumberTime in Patent Office1,243 DaysField of Search361/234US Class Current361/234CPC Class CodesH01L 21/6831 using electrostatic chucksH01L 21/68757 characterised by a coating ...
