Out-of-plane sensing device
First Claim
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1. An out-of-plane sensing device, comprising:
- a first substrate;
a proof mass movable perpendicular to the first substrate;
a first frame positioned on the first substrate and enclosing the proof mass;
at least one first spring connecting the proof mass to the first frame;
a first electrode extending from a first side of the proof mass toward the first frame;
a first counter electrode extending from the first frame toward the proof mass, wherein a projection of the first electrode onto the first substrate overlaps with a projection of the first counter electrode onto the first substrate;
a second electrode extending from a second side of the proof mass toward the first frame; and
a second counter electrode extending from the first frame toward the proof mass, wherein a projection of the second electrode onto the first substrate overlaps with a projection of the second counter electrode onto the first substrate;
wherein a distance from the second electrode to the second counter electrode will increase when the proof mass moves to decrease a distance from the first electrode to the first counter electrode.
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Abstract
An out-of-plane sensing device is provided. A proof mass is movable with respect to a substrate. A frame is positioned on the substrate and encloses the proof mass. At least one spring connects the proof mass to the frame so that the spring will exert a force on the proof mass to make the proof mass move back to its equilibrium position when the proof mass moves perpendicularly to the substrate. An electrode extends from the proof mass toward the frame. A counter electrode extends from the frame toward the proof mass, wherein the projection of the electrode onto the substrate overlaps with that of the counter electrode onto the substrate.
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Citations
20 Claims
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1. An out-of-plane sensing device, comprising:
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a first substrate; a proof mass movable perpendicular to the first substrate; a first frame positioned on the first substrate and enclosing the proof mass; at least one first spring connecting the proof mass to the first frame; a first electrode extending from a first side of the proof mass toward the first frame; a first counter electrode extending from the first frame toward the proof mass, wherein a projection of the first electrode onto the first substrate overlaps with a projection of the first counter electrode onto the first substrate; a second electrode extending from a second side of the proof mass toward the first frame; and a second counter electrode extending from the first frame toward the proof mass, wherein a projection of the second electrode onto the first substrate overlaps with a projection of the second counter electrode onto the first substrate; wherein a distance from the second electrode to the second counter electrode will increase when the proof mass moves to decrease a distance from the first electrode to the first counter electrode. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11)
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12. An out-of-plane sensing device, comprising:
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a first substrate; a second substrate positioned over the first substrate and moveable perpendicular to the first substrate; a proof mass movable parallel to the second substrate; a second frame positioned on the second substrate and enclosing the proof mass; a first frame positioned on the first substrate and enclosing the second substrate; at least one first spring connecting the second substrate to the first frame; at least one second spring connecting the proof mass to the second frame; a first electrode extending from a first side of the second substrate toward the first frame; a second electrode extending from the first frame toward the second substrate, wherein a projection of the first electrode onto the first substrate overlaps with a projection of the second electrode onto the first substrate; a plurality of third electrodes extending from the second frame toward the proof mass; a plurality of fourth electrodes extending from the proof mass toward the second frame and interleaved with the plurality of third electrodes, wherein the plurality of third and fourth electrodes are configured to sense in-plane movement; a fifth electrode extending from a second side of the second substrate toward the first frame; and a sixth electrode extending from the first frame toward the second substrate, wherein a projection of the fifth electrode onto the first substrate overlaps with a projection of the sixth electrode onto the first substrate; wherein a distance from the fifth electrode to the sixth electrode will increase when the second substrate moves to decrease a distance from the first electrode to the second electrode. - View Dependent Claims (13, 14, 15, 16, 17, 18, 19, 20)
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Specification