Method for controlling the sublimation of reactants

• US 7,851,019 B2
• Filed: 07/10/2008
• Issued: 12/14/2010
• Est. Priority Date: 06/17/2002
• Status: Expired due to Term

• Current Assignee: ASM International NV
• Original Assignee: ASM International NV
• Inventors: Verghese, Mohith, Tuominen, Marko, Shero, Eric
• Primary Examiner(s): Cleveland; Michael
• Assistant Examiner(s): Horning; Joel G
• Application Number:
  US12/170,801
• Publication Number:
  US 20080274276A1
• Time in Patent Office: 887 Days
• Field of Search: 392/388
• US Class Current: 427/255.23
• CPC Class Codes: C23C 16/405 of refractory metals or yttrium
• CPC Class Codes: C23C 16/4481 by evaporation using carrier gas in contact with the source material C23C16/4486 takes precedence
• CPC Class Codes: C23C 16/4483 using a porous body
• CPC Class Codes: C23C 16/45525 Atomic layer deposition [ALD]

Abstract

An apparatus and method improves heating of a solid precursor inside a sublimation vessel. In one embodiment, inert, thermally conductive elements are interspersed among units of solid precursor. For example the thermally conductive elements can comprise a powder, beads, rods, fibers, etc. In one arrangement, microwave energy can directly heat the thermally conductive elements.

Claims

1. A method of producing a vapor from a solid precursor for processing a substrate, comprising:

placing independent solid units of precursor into a vessel;

interspersing a plurality of independent units of thermally conductive material with the units of precursor, the plurality of independent units comprising a plurality of rods, wherein interspersing comprises inserting the plurality of rods into the vessel, wherein each independent unit of thermally conductive material is surrounded by the units of precursor, the units of precursor being separate and independent of the units of thermally conductive material;

feeding a carrier gas into the vessel through an inlet of the vessel;

forming a vapor through applying energy from a separate energy source to both the thermally conductive material and the solid units of precursor; and

transporting the vapor from an outlet of the vessel to a reaction chamber with said carrier gas.

2. The method of claim 1, further comprising reacting the vapor to deposit a layer on a substrate.

3. The method of claim 2, wherein reacting the vapor to deposit the layer comprises atomic layer deposition (ALD).

4. The method of claim 2, wherein reacting the vapor to deposit the layer comprises chemical vapor deposition (CVD).

5. The method of claim 1, wherein inserting the rods comprises inserting a base plate into the vessel, wherein the rods are attached to the base plate.

6. The method of claim 1, wherein inserting the rods comprises inserting the rods independently of one another.

7. The method of claim 1, wherein interspersing the units of thermally conductive material comprises supplying the plurality of rods attached to a base of the vessel.

8. The method of claim 1, wherein applying energy from a separate energy source comprises flowing heat along a primary axis of each rod and then radially outward from each rod to the solid units.

9. The method of claim 1, wherein interspersing comprises providing the units of thermally conductive material with a thermal conductivity of at least about 50 W/M*K at room temperature.

10. The method of claim 1, wherein interspersing comprises providing the units of thermally conductive material with a thermal conductivity of at least about 80 W/M*K at room temperature.

11. The method of claim 1, wherein applying energy from a separate energy source comprises transmitting microwave energy from outside the vessel.

12. The method of claim 11, wherein applying energy from a separate energy source comprises absorbing the microwave energy in the thermally conductive material and transmitting the energy as heat to the solid units of precursor.

13. The method of claim 1, wherein interspersing comprises providing the plurality of rods, wherein the rods are machined and attached to a base of the vessel.

14. The method of claim 1, wherein inserting the rods comprises providing the thermally conductive material comprising stainless steel.

15. The method of claim 1, wherein inserting the rods comprises providing the thermally conductive material comprising silicon carbide-coated graphite.

16. The method of claim 1, wherein inserting the rods comprises providing substantially cylindrical rods.

17. The method of claim 1, wherein inserting the rods comprises providing elongated rods.

18. The method of claim 1, wherein inserting the rods comprises providing substantially straight rods.

19. The method of claim 1, wherein inserting the rods comprises providing screens mounted at various levels along lengths of the rods.