UV treatment for carbon-containing low-k dielectric repair in semiconductor processing

• US 7,851,232 B2
• Filed: 10/30/2006
• Issued: 12/14/2010
• Est. Priority Date: 10/30/2006
• Status: Active Grant

• Current Assignee: Novellus Systems Incorporated (Lam Research Corporation)
• Original Assignee: Novellus Systems Incorporated (Lam Research Corporation)
• Inventors: Crew, William, van Schravendijk, Bart
• Primary Examiner(s): Richards; N Drew
• Assistant Examiner(s): Withers; Grant S
• Application Number:
  US11/590,661
• Publication Number:
  US 20100261349A1
• Time in Patent Office: 1,506 Days
• Field of Search: 438/4
• US Class Current: 438/4
• CPC Class Codes: H01L 21/3105 After-treatment
• CPC Class Codes: H01L 21/76814 post-treatment or after-treatment, e.g. cleaning or removal of oxides on underlying conductors
• CPC Class Codes: H01L 21/76825 by exposing the layer to particle radiation, e.g. ion implantation, irradiation with UV light or electrons etc. plasma treatment H01L21/76826

Abstract

A method for the ultraviolet (UV) treatment of carbon-containing low-k dielectric enables process-induced damage repair. The method is particularly applicable in the context of damascene processing. A method provides for forming a semiconductor device by depositing a carbon-containing low-k dielectric layer on a substrate and forming a trench in the low-k dielectric layer, the trench having sidewalls ending at a bottom. The trench is then exposed to UV radiation and, optionally a gas phase source of —CH₃ groups, to repair damage to the carbon-containing low-k material of the trench sidewalls and bottom caused by the trench formation process (generally etching, ashing, and wet or dry cleaning). A similar treatment, with or without the gas phase source of —CH₃ groups, may be applied to repair damage caused in a subsequent planarization operation.

Claims

1. A method of forming a semiconductor device in damascene processing, comprising:

receiving in a processing chamber a semiconductor device substrate comprising a carbon-containing low-k dielectric layer having formed therein a trench, the trench having sidewalls and a bottom;

exposing the sidewalls and bottom of the trench to UV radiation;

whereby process induced low-k dielectric damage in the trench is repaired.

2. The method of claim 1, further comprising exposing the trench to a gas phase source of methyl (—

CH₃) groups during the UV radiation.

3. The method of claim 2, wherein the gas phase source of —

CH₃ groups generates active methyl species during the UV radiation.

4. The method of claim 2, wherein the UV radiation lowers activation energy for a reaction between the damaged dielectric in the trench and the gas phase source of —

CH₃ groups.

5. The method of claim 2, wherein the gas phase source of —

CH₃ groups comprises one or more selected from the group consisting of organo-silanes, -silazanes, and -siloxanes;

acetaldehyde;

alkanes;

alkenes; and

alkynes.

6. The method of claim 5, wherein the gas phase source of —

CH₃ groups comprises one or more selected from the group consisting of dichlorodimethylsilane (DCDMS), chlorotrimethylsilane (CTMS), hexamethyldisilazane (HMDS), hexamethyldisiloxane (HMDSO), tetravinyltetramethylcyclotetrasiloxane (TVTMCTS), acetaldehyde, methane, ethane, ethylene, acetylene, and combinations thereof.

7. The method of claim 6, wherein the gas phase source of —

CH₃ groups comprises one or more selected from the group consisting of dichlorodimethylsilane (DCDMS), chlorotrimethylsilane (CTMS), hexamethyldisilazane (HMDS), hexamethyldisiloxane (HMDSO), tetravinyltetramethylcyclotetrasiloxane (TVTMCTS), and combinations thereof.

8. The method of claim 5, wherein the gas phase source further comprises a source of H and —

O groups.

9. The method of claim 5, wherein the gas phase source further comprises inert carrier gas.

10. The method of claim 1, wherein the UV radiation has a power density of about 500 mW-5 W/cm² and a wavelength from about 150-500 nm, and the exposure is conducted at a temperature of about room temperature up to 450°

C. for less than 20 minutes.

11. The method of claim 1, wherein the UV radiation has a power density of about 1-3 W/cm² and a wavelength from about 200-400 nm, and the exposure is conducted at a temperature of about 200-400°

C. for less than 5 minutes.

12. The method of claim 1, further comprising a further UV exposure of the device substrate following the trench repair, filling of the trench with a conductive material, and planarization of the of a top surface of the device substrate has been planarized such that both the low-k dielectric and the conductive material in the trench are exposed at the surface.

13. The method of claim 12, further comprising removing oxide from the conductive material.

14. The method of claim 12, wherein the conductive material is a metal.

15. The method of claim 12, further comprising exposing the planarized surface to a gas phase source of —

CH₃ groups during the UV radiation exposure.

16. The method of claim 15, wherein the gas phase source of —

CH₃ groups comprises one or more selected from the group consisting of organo-silanes, -silazanes, and -siloxanes;

acetaldehyde;

alkanes;

alkenes; and

alkynes.

17. The method of claim 16, wherein the gas phase source of —

CH₃ groups comprises one or more selected from the group consisting of dichlorodimethylsilane (DCDMS), chlorotrimethylsilane (CTMS), hexamethyldisilazane (HMDS), hexamethyldisiloxane (HMDSO), tetravinyltetramethylcyclotetrasiloxane (TVTMCTS), acetaldehyde, methane, ethane, ethylene, acetylene, and combinations thereof.

18. The method of claim 17, wherein the gas phase source of —

CH₃ groups comprises one or more selected from the group consisting of dichlorodimethylsilane (DCDMS), chlorotrimethylsilane (CTMS), hexamethyldisilazane (HMDS), hexamethyldisiloxane (HMDSO), tetravinyltetramethylcyclotetrasiloxane (TVTMCTS), and combinations thereof.

19. The method of claim 12, wherein the conductive material is copper.

20. The method of claim 12, wherein the UV radiation has a power density of about 500 mW-5 W/cm² and a wavelength from about 150-500 nm, and the exposure is conducted at a temperature of about room temperature up to 450°

C. for less than 20 minutes.

21. The method of claim 12, wherein the UV radiation has a power density of about 1-3 W/cm² and a wavelength from about 200-400 nm, and the exposure is conducted at a temperature of about 200-400°

C. for less than 5 minutes.

22. The method of claim 1, wherein the carbon-containing low-k dielectric comprises CDO.