Micro electro mechanical system
First Claim
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1. A micro-electro mechanical system (MEMS) accelerometer, comprising:
- a first wafer comprising a first movable portion corresponding to an x-y accelerometer and a second movable portion corresponding to a z accelerometer, wherein each said movable portion comprises at least one flexure member and a proof mass, each of said proof mass and said flexure member being formed by the selective removal of material from a top side and a bottom side of said first wafer; and
a second wafer bonded to said first wafer;
wherein a thickness of said at least one flexure member of said first movable portion is independent of a thickness of said at least one flexure member of said second movable portion and a thickness of said proof mass of said first movable portion is independent of a thickness of said at least one proof mass of said second movable portion.
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Abstract
Embodiments of a micro electro mechanical system are disclosed.
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Citations
8 Claims
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1. A micro-electro mechanical system (MEMS) accelerometer, comprising:
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a first wafer comprising a first movable portion corresponding to an x-y accelerometer and a second movable portion corresponding to a z accelerometer, wherein each said movable portion comprises at least one flexure member and a proof mass, each of said proof mass and said flexure member being formed by the selective removal of material from a top side and a bottom side of said first wafer; and a second wafer bonded to said first wafer; wherein a thickness of said at least one flexure member of said first movable portion is independent of a thickness of said at least one flexure member of said second movable portion and a thickness of said proof mass of said first movable portion is independent of a thickness of said at least one proof mass of said second movable portion. - View Dependent Claims (2, 3, 4, 5, 6)
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7. A MEMS transducer device, comprising:
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a first wafer comprising first and second movable portions, wherein each said movable portion comprises at least one electrode, at least one flexure member, and a proof mass, each of said proof mass and said flexure member being formed by the selective removal of material from a top side and a bottom side of said first wafer; a second wafer bonded to said first wafer, said second wafer comprising at least one electrode corresponding to each said electrode in said first wafer; and at least one circuit disposed at least partially within said second wafer and configured to detect lateral movement of said proof mass of said first movable portion; and at least one circuit disposed at least partially within said second wafer and configured to detect medial movement of said proof mass of said second movable portion; wherein a thickness of said proof mass of said first movable portion is independent of a thickness of said proof mass of said second movable portion, and a thickness of said at least one flexure member of said first movable portion is independent of a thickness of said at least one flexure member of said second movable portion. - View Dependent Claims (8)
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Specification