Piezoelectric-actuator driving device and exposure apparatus including the same

• US 7,851,969 B2
• Filed: 09/30/2008
• Issued: 12/14/2010
• Est. Priority Date: 10/09/2007
• Status: Active Grant

• Current Assignee: Canon Kabushiki Kaisha (Canon Inc.)
• Original Assignee: Canon Kabushiki Kaisha (Canon Inc.)
• Inventors: Ota, Jun
• Primary Examiner(s): Dougherty; Thomas M
• Application Number:
  US12/242,179
• Publication Number:
  US 20090092929A1
• Time in Patent Office: 805 Days
• Field of Search: 310/316.03, 310/317, 29/253.5, 359/443
• US Class Current: 310/317
• CPC Class Codes: G02B 7/023 permitting adjustment
• CPC Class Codes: G03F 7/70825 Mounting of individual elements, e.g. mounts, holders or supports workpiece or mask holders G03F7/707
• CPC Class Codes: H02N 2/06 Drive circuits; Control arrangements or methods
• CPC Class Codes: H10N 30/50 having a stacked or multilayer structure
• CPC Class Codes: H10N 30/802 Drive or control circuitry or methods for piezoelectric or electrostrictive devices not otherwise provided for
• CPC Class Codes: Y10T 29/42 Piezoelectric device making

Abstract

A driving device includes a plurality of laminated units formed by alternately stacking piezoelectric element layers and electrode layers, a failure detecting unit configured to detect failure of the laminated units, a plurality of switches provided corresponding to the laminated units and configured to enable and disable current supply to the laminated units, and a driving circuit configured to supply a current for driving to a normal laminated unit of the laminated units, on the basis of an output from the failure detecting unit.

Claims

1. A driving device comprising:

a plurality of laminated units formed by alternately stacking piezoelectric element layers and electrode layers;

a failure detecting unit configured to detect failure of one or more of the laminated units;

a plurality of switches provided corresponding to the laminated units and each configured to enable and disable current supply to one of the laminated units; and

a driving circuit configured to supply a current for driving to a laminated unit of the laminated units which is not detected to be faulty, on the basis of an output from the failure detecting unit.

2. The driving device according to claim 1, wherein the failure detecting unit includes:

a detection unit configured to detect currents passing through the laminated units or voltages applied to the laminated units; and

a comparison unit configured to compare an output from the detection unit with a preset current or voltage reference value.

3. The driving device according to claim 1, wherein the failure detecting unit includes:

a detection unit configured to detect displacement of the laminated units; and

a comparison unit configured to compare an output from the detection unit with a preset displacement reference value.

4. A driving device as claimed in claim 1 in which the laminated units are physically arranged in series.

5. A driving device as claimed in claim 1 in which the laminated units are electrically connected in parallel.

6. An exposure apparatus comprising:

a projection optical system configured to project a pattern of an original onto a substrate,

wherein at least one optical element provided in the projection optical system is driven by a driving device comprising;

a plurality of laminated units formed by alternately stacking piezoelectric element layers and electrode layers;

a failure detecting unit configured to detect failure of one or more of the laminated units;

a plurality of switches provided corresponding to the laminated units and each configured to enable and disable current supply to one of the laminated units; and

a driving circuit configured to supply a current for driving to a laminated unit of the laminated units which is not detected to be faulty, on the basis of an output from the failure detecting unit.

7. A device manufacturing method comprising the steps of:

exposing a substrate with an exposure apparatus; and

developing the exposed substrate,

wherein the exposure apparatus includes a driving device configured to drive at least one optical element provided in a projection optical system, and

wherein the driving device includes;

a plurality of laminated units formed by alternately stacking piezoelectric element layers and electrode layers;

a failure detecting unit configured to detect failure of one or more of the laminated units;

a plurality of switches provided corresponding to the laminated units and each configured to enable and disable current supply to one of the laminated units; and

a driving circuit configured to supply a current for driving to a laminated unit of the laminated units detected not to be faulty, on the basis of an output from the failure detecting unit.