Sharing resources in a system for testing semiconductor devices

• US 7,852,094 B2
• Filed: 12/06/2006
• Issued: 12/14/2010
• Est. Priority Date: 12/06/2006
• Status: Expired due to Fees

• Current Assignee: FormFactor Incorporated
• Original Assignee: FormFactor Incorporated
• Inventors: Chraft, Matthew E., Eldridge, Benjamin N., Sporck, A. Nicholas, Henson, Roy J.
• Primary Examiner(s): Nguyen; Vinh P
• Application Number:
  US11/567,705
• Publication Number:
  US 20080136432A1
• Time in Patent Office: 1,469 Days
• Field of Search: 324754-765, 714/733, 714/734
• US Class Current: 324/754.07
• CPC Class Codes: G01R 31/318511 Wafer Test
• CPC Class Codes: G01R 31/31926 Routing signals to or from the device under test [DUT], e.g. switch matrix, pin multiplexing

Abstract

Probes in a plurality of DUT probe groups can be connected in parallel to a single tester channel. In one aspect, digital potentiometers can be used to effectively switch the tester channel from a probe in one DUT probe group to a probe in another DUT probe group. In another aspect, switches in parallel with a resistor can accomplish such switching. In yet another aspect, a chip select terminal on each DUT can be used to effectively connect and disconnect internal DUT circuitry to the tester channel. Multiple DUT probe groups so connected can be used to create different patterns of DUT probe groups for testing different patterns of DUTs and thus facilitate sharing tester channels.

Claims

1. A contactor device comprising:

an electrical interface to a plurality of communications channels from a tester;

a plurality of electrically conductive probes disposed to contact electronic devices to be tested;

electrically conductive paths electrically connecting the electrical interface and ones of the probes, a first one of the electrical paths electrically connecting a first one of the communications channels to a first set of more than one of the probes; and

means for selecting fewer than all of the probes in the first set of probes through which to provide test signals from the first communication channel to at least one of the electronic devices.

2. The probe card assembly of claim 1, wherein:

the first set of probes comprises at least three probes, and

the means for selecting is configured to select as a first combination any combination of fewer than all of the probes in the first set of probes through which to provide the test signals.

3. The probe card assembly of claim 1, wherein the means for selecting comprises a plurality of potentiometers each disposed in the first electrical path between the electrical interface and one of the probes of the first set of probes.

4. The probe card assembly of claim 3, wherein each of the potentiometers comprises a control input that controls an amount of impedance of the potentiometer.

5. The contactor device of claim 4, wherein:

while the control input is in a first state, the impedance of the potentiometer is sufficiently high to effectively prevent test signals from passing through the potentiometer, and

while the control input is in a second state, the impedance of the potentiometer is sufficiently low to effectively allow test signals to pass through the potentiometer.

6. The probe card assembly of claim 1 further comprising a plurality of resistors each disposed in the first electrical path between the electrical interface and one of the probes of the first set of probes.

7. The probe card assembly of claim 6, wherein the means for selecting comprises a plurality of by-pass switches each configured to, while closed, provide an electrical path by passing one of the resistors.

8. The contactor device of claim 7, wherein the impedance level of each of the resistors is sufficiently high to effectively prevent test signals from passing through the resistor.

9. The probe card assembly of claim 8, wherein each of the switches comprises a control input that controls whether the switch is open or closed.

10. The probe card assembly of claim 1, wherein the probes in the first set of probes are configured to contact a first set of the electronic devices, and the means for selecting comprises a second plurality of probes each configured to contact an enable input on one of the first set of electronic devices.

11. The contactor device of claim 1, wherein the contactor device comprises a probe card assembly.

12. An apparatus for testing a plurality of semiconductor devices comprising:

a chip select port on at least one of the devices that couples contacts on the device to internal circuits within the device in response to a first state on the port and that uncouples contacts on the device from the internal circuits in response to a second state on the port;

a plurality of groups of test probes, each group of test probes configured to contact one of the devices;

a tester having a plurality of groups of tester channels, each group of tester channels configured to correspond to one of the groups of test probes, wherein a number of the groups of tester channels is less than a number of the groups of test probes, and at least one of the groups of tester channels is connected to more than one of the groups of test probes via conductors disposed between the tester channels and the test probes; and

a processor programmed to selectively apply the first and second states to the chip select port during testing of the devices.

13. The apparatus of claim 12, wherein the processor is programmed to connect a first predetermined pattern of the groups of test probes to the groups of tester channels during a first touchdown of ones of the probes onto contacts of a first group of the devices and to connect a second predetermined pattern of the groups of test probes to the groups of tester channels during a second touchdown of ones of the probes onto contacts of a second group of the devices.

14. The apparatus of claim 13, wherein said first and second predetermined patterns are different from one another.

15. The apparatus of claim 12, wherein when the groups of test probes touch contacts on corresponding devices and said first state is asserted, the one device is effectively connected to a first of the groups of tester channels.

16. The apparatus of claim 12, wherein when the groups of test probes touch contacts on corresponding devices and said second state is asserted, the one device is effectively disconnected from the first of the groups of tester channels.

17. The apparatus of claim 12, wherein the groups of test probes are part of a probe card assembly.

18. The apparatus of claim 12, wherein the devices are formed on a semiconductor wafer.