Human-readable, bi-state environmental sensors based on micro-mechanical membranes

• US 7,852,491 B2
• Filed: 03/31/2008
• Issued: 12/14/2010
• Est. Priority Date: 03/31/2008
• Status: Expired due to Fees

• Current Assignee: Snaptrack Incorporated (Qualcomm, Inc.)
• Original Assignee: Qualcomm MEMS Technologies Incorporated (Qualcomm, Inc.)
• Inventors: Webster, James Randolph
• Primary Examiner(s): Toatley; Gregory J
• Assistant Examiner(s): Richey; Scott M
• Application Number:
  US12/060,078
• Publication Number:
  US 20090244543A1
• Time in Patent Office: 988 Days
• Field of Search: 356/454, 356/505, 356/506, 356/519
• US Class Current: 356/519
• CPC Class Codes: G01N 21/45 using interferometric methods; using Schlieren methods
• CPC Class Codes: G01N 21/75 Systems in which material is subjected to a chemical reaction, the progress or the result of the reaction being investigated systems in which material is burnt in a flame or plasma G01N21/72, G01N21/73
• CPC Class Codes: G02B 26/001 based on interference in an adjustable optical cavity interference filters G02B5/28; devices or arrangements using multiple reflections in spectrometry or monochromators G01J3/26

Abstract

An environmental sensing device includes an interferometric modulator which permanently actuates, in a visually-detectable manner, in response to being exposed to a predetermined environmental threshold or condition. The device can include a reactive layer, coating, or proof mass disposed on a movable member of the interferometric modulator. The reactive layer, coating, or proof mass can expand, contract, bend, or otherwise move when exposed to a predefined chemical, level of humidity, temperature threshold, type of radiation, and/or level of mechanical shock, causing the interferometric modulator to collapse and permanently indicate such exposure.

Claims

1. A sensor, comprising:

an interferometric modulator, the modulator configured to permanently actuate in response to a presence of at least one selected chemical, wherein the actuation of the interferometric modulator is visually detectable.

2. The sensor of claim 1, wherein said actuation occurs without requiring application of a voltage across the interferometric modulator.

3. The sensor of claim 1, wherein the interferometric modulator comprises a chemically active layer configured to cause said actuation in response to the presence of said chemical.

4. The sensor of claim 3, wherein the interferometric modulator comprises an optical stack and a movable layer, said chemically active layer being disposed on the movable layer.

5. The sensor of claim 1, further comprising a package configured to seal an internal environment of the interferometric modulator from an external environment, the internal environment being configured to prevent permanent actuation of the modulator, the package comprising at least one removable portion configured to expose the internal environment to the external environment upon removal to activate said sensor.

11. A display comprising an array of sensors according to claim 1.

6. A sensor comprising:

means for interferometrically modulating light; and

means for inducing permanent actuation of the light modulating means in response to a presence of at least one selected chemical, wherein said actuation is visually detectable.

7. The sensor of claim 6, wherein said actuation occurs without requiring application of a voltage across the light modulating means.

8. The sensor of claim 6, wherein the inducing means comprises a chemically active layer disposed on a movable member of the light modulating means.

9. The sensor of claim 6, further comprising means for activating the inducing means.

10. The sensor of claim 9, wherein the activating means comprises a removable sealing layer disposed on the light modulating means.

12. A method of manufacturing an interferometric modulator, the method comprising:

providing a reactive layer on a movable member of the interferometric modulator, the reactive layer being configured to deform sufficiently to cause the interferometric modulator to collapse when exposed to a predetermined chemical; and

treating the movable member or an optical stack of the interferometric modulator so as to ensure that adhesion will be permanent upon collapse.

13. The method of claim 12, wherein said reactive layer comprises an expansion layer disposed on a side of the movable member facing the optical stack.

14. The method of claim 12, wherein said reactive layer comprises a contraction layer disposed on a side of the movable member facing away from the optical stack.

15. The method of claim 12, wherein said treating comprises driving charge into a surface dielectric film of the optical stack.

16. The method of claim 12, wherein said treating comprises roughening a contact surface of at least one of the movable member or the optical stack.

17. The method of claim 12, wherein said treating comprises coating a contact surface of at least one of the movable member or the optical stack with an adhesive.

18. A method of indicating exposure to an environmental stimulus, the method comprising:

providing an interferometric modulator having a reactive layer disposed on a movable member of the interferometric modulator, the reactive layer being configured to deform in response to being exposed to a predetermined chemical by an amount sufficient to cause the interferometric modulator to collapse, the interferometric modulator being configured to ensure that said collapse is permanent.