Human-readable, bi-state environmental sensors based on micro-mechanical membranes
First Claim
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1. A sensor, comprising:
- an interferometric modulator, the modulator configured to permanently actuate in response to a presence of at least one selected chemical, wherein the actuation of the interferometric modulator is visually detectable.
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Abstract
An environmental sensing device includes an interferometric modulator which permanently actuates, in a visually-detectable manner, in response to being exposed to a predetermined environmental threshold or condition. The device can include a reactive layer, coating, or proof mass disposed on a movable member of the interferometric modulator. The reactive layer, coating, or proof mass can expand, contract, bend, or otherwise move when exposed to a predefined chemical, level of humidity, temperature threshold, type of radiation, and/or level of mechanical shock, causing the interferometric modulator to collapse and permanently indicate such exposure.
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Citations
18 Claims
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1. A sensor, comprising:
an interferometric modulator, the modulator configured to permanently actuate in response to a presence of at least one selected chemical, wherein the actuation of the interferometric modulator is visually detectable. - View Dependent Claims (2, 3, 4, 5, 11)
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6. A sensor comprising:
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means for interferometrically modulating light; and means for inducing permanent actuation of the light modulating means in response to a presence of at least one selected chemical, wherein said actuation is visually detectable. - View Dependent Claims (7, 8, 9, 10)
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12. A method of manufacturing an interferometric modulator, the method comprising:
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providing a reactive layer on a movable member of the interferometric modulator, the reactive layer being configured to deform sufficiently to cause the interferometric modulator to collapse when exposed to a predetermined chemical; and treating the movable member or an optical stack of the interferometric modulator so as to ensure that adhesion will be permanent upon collapse. - View Dependent Claims (13, 14, 15, 16, 17)
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18. A method of indicating exposure to an environmental stimulus, the method comprising:
providing an interferometric modulator having a reactive layer disposed on a movable member of the interferometric modulator, the reactive layer being configured to deform in response to being exposed to a predetermined chemical by an amount sufficient to cause the interferometric modulator to collapse, the interferometric modulator being configured to ensure that said collapse is permanent.
Specification