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Method of manufacturing magnetic field detector

  • US 7,858,400 B2
  • Filed: 07/10/2008
  • Issued: 12/28/2010
  • Est. Priority Date: 12/14/2007
  • Status: Expired due to Fees
First Claim
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1. A method of manufacturing a magnetic field detector using a thin film for detecting magnetic beads, the method comprising:

  • preparing a substrate;

    depositing the thin film on an upper surface of the substrate;

    etching the thin film to form a ring-shaped magnetoresistive element;

    forming, on the upper surface of a substrate, electrode pads connected to the magnetoresistive element;

    forming a protective layer that covers the magnetoresistive element and portions of the electrode pads; and

    forming, on an upper surface of the protective layer, a magnetic bead limiting layer which has a ring-shape that encloses the entire surface of the magnetoresistive element, the magnetic bead limiting layer used for impounding a solution containing the magnetic beads.

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