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Liquid crystal display device and fabricating method thereof using three mask process

  • US 7,859,639 B2
  • Filed: 12/20/2005
  • Issued: 12/28/2010
  • Est. Priority Date: 12/24/2004
  • Status: Expired due to Fees
First Claim
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1. A method of fabricating a liquid crystal display device, comprising:

  • a first mask process of forming a first mask pattern group including a gate line, a gate electrode connected to the gate line and a common line substantially parallel to the gate line having a first conductive layer group structure including at least double conductive layers which have a lowermost layer of transparent conductive layer and upper conductive layer of metal layer, and a common electrode extended from the lowermost layer of transparent conductive layer of the common line on a substrate;

    a second mask process of forming a gate insulating film on the first mask pattern group and a semiconductor pattern on the gate insulating film; and

    a third mask process of forming a third mask pattern group including a data line, a source electrode connected to the data line and a drain electrode opposite the source electrode having a second conductive layer group structure including at least double conductive layers which have a lowermost layer of transparent conductive layer and upper conductive layer of metal layer, and a pixel electrode extended from the lowermost layer of transparent conductive layer of the drain electrode, wherein the data line, the source electrode and the drain electrode are over the gate insulating film and the source electrode and the drain electrode are on both ends of the semiconductor pattern.

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