Stiction mitigation with integrated mech micro-cantilevers through vertical stress gradient control
First Claim
1. A micro-electromechanical (MEMS) device, said device comprising:
- a first component;
a second component movable relative to the first component in a first direction; and
at least one restoration feature, on the second component, that applies a restoring force to the second component in a second direction opposite to the first direction and comprises at least one deflecting portion that borders an opening through the second component and extends towards the first component when the first and second components are apart from each other.
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Accused Products
Abstract
The present disclosure relates to the mitigation of stiction in MEMS devices. In some embodiments, a MEMS device may be provided with one or more restoration features that provide an assisting mechanical force for mitigating stiction. The restoration feature may be implemented as one or more deflectable elements, where the deflectable elements may have various configurations or shapes, such as a chevron, cross, and the like. For example, the restoration feature can be a cantilever that deflects when at least one component comes into contact or proximity with another component. Multiple restoration features also may be employed and placed strategically within the MEMS device to maximize their effectiveness in mitigating stiction.
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Citations
31 Claims
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1. A micro-electromechanical (MEMS) device, said device comprising:
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a first component; a second component movable relative to the first component in a first direction; and at least one restoration feature, on the second component, that applies a restoring force to the second component in a second direction opposite to the first direction and comprises at least one deflecting portion that borders an opening through the second component and extends towards the first component when the first and second components are apart from each other. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24, 25)
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26. A micro-electromechanical (MEMS) apparatus comprising:
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means for partially reflecting light; means for reflecting light, wherein the reflecting means is movable in a first direction relative to the partially reflecting means; and means for applying a restoring force to the reflecting means, the restoring means on the reflecting means, the restoring force in a second direction opposite to the first direction, the restoring means bordering an opening through the reflecting means and extending towards the partially reflecting means when the partially reflecting means and the reflecting means are apart from each other. - View Dependent Claims (27, 28, 29, 30, 31)
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Specification