Optical system for transforming numerical aperture

• US 7,859,756 B2
• Filed: 03/30/2009
• Issued: 12/28/2010
• Est. Priority Date: 02/06/2006
• Status: Expired due to Fees

• Current Assignee: ASML Holding NV
• Original Assignee: ASML Holding NV
• Inventors: Vladimirsky, Yuli, Ryzhikov, Lev
• Primary Examiner(s): Scwartz; Jordan M.
• Assistant Examiner(s): JONES, JAMES
• Application Number:
  US12/413,963
• Publication Number:
  US 20090251786A1
• Time in Patent Office: 638 Days
• Field of Search: 359/619
• US Class Current: 359/619
• CPC Class Codes: G03F 7/70075 Homogenization of illumination intensity in the mask plane by using an integrator, e.g. fly's eye lens, facet mirror or glass rod, by using a diffusing optical element or by beam deflection
• CPC Class Codes: G03F 7/70208 Multiple illumination paths, e.g. radiation distribution devices, microlens illumination systems, multiplexers or demultiplexers for single or multiple projection systems
• CPC Class Codes: G03F 7/70275 Multiple projection paths, e.g. array of projection systems, microlens projection systems or tandem projection systems
• CPC Class Codes: G03F 7/70291 Addressable masks, e.g. spatial light modulators [SLMs], digital micro-mirror devices [DMDs] or liquid crystal display [LCD] patterning devices

Abstract

A system is provided to form illumination light beams having desirable divergence and directivity. For instance, the system can include an optical element and a relay. The optical element can include a pupil defining element. Further, the relay can have a first and second lens array arranged in series and configured to receive the plurality of beams and to re-image the plurality of beams into a corresponding plurality of beams in an image plane. Each of the plurality of corresponding beams can have a numerical aperture less than a numerical aperture of each of the plurality of beams.

Claims

1. A system comprising:

an optical element that comprises a pupil defining element configured to receive a beam from a radiation source and to produce a pupil defined beam, including a plurality of beams, therefrom;

a relay having a first and second lens arrays arranged in series, wherein the first lens array receives the plurality of beams and the second lens array directly receives from the first lens array the plurality of beams that pass through the first lens array and re-images the plurality of beams into a plurality of corresponding beams in an image plane to produce a plurality of corresponding beams; and

another relay configured to receive and to direct a condensed plurality of beams onto an array of individually controllable elements, wherein the condensed plurality of beams is based on the plurality of corresponding beams.

2. The system of claim 1, wherein the optical element comprises at least one of a diffractive optical element and a refractive optical element.

3. The system of claim 1, wherein the first and second lens arrays comprise fly'"'"'s eye lenses.

4. The system of claim 1, wherein the first and second lens arrays are configured to maintain a double telecentricity within the system.

5. The system of claim 1, wherein the relay is configured to direct each corresponding beam in the plurality of corresponding beams onto corresponding portions of the another relay.

19. The system of claim 1, wherein each of the plurality of corresponding beams has a numerical aperture less than a numerical aperture of each of the plurality of beams after the plurality of corresponding beams has passed through the second lens array.

6. A system comprising:

an optical element that comprises a field defining element configured to receive a beam and generate a field defined beam, including a plurality of beams, therefrom;

a first relay having a first and second lens arrays arranged in series and configured to receive the plurality of beams and to re-image the plurality of beams into a plurality of corresponding beams in an image plane, the plurality of corresponding beams having a numerical aperture less than a numerical aperture of each of the plurality of beams; and

a second relay having a third and fourth lens arrays arranged in series and configured to receive the field defined beam and to generate another plurality of corresponding beams therefrom, each of the another plurality of corresponding beams having a numerical aperture less than a numerical aperture of the field defined beam.

7. The system of claim 6, further comprising:

a third relay configured to receive and to direct a condensed plurality of beams onto a patterning device, wherein the condensed plurality of beams is based on the another plurality of corresponding beams.

8. The system of claim 7, wherein the patterning device comprises an array of individually controllable elements.

9. The system of claim 6, wherein the optical element comprises at least one of a diffractive optical element and a refractive optical element.

10. The system of claim 6, wherein the first, second, third, and fourth lens arrays comprise fly'"'"'s eye lenses.

11. The system of claim 6, wherein the first and second lens arrays are configured to maintain a double telecentricity within the system.

12. The system of claim 6, wherein the first lens relay is configured to direct each corresponding beam in the plurality of corresponding beams onto corresponding portions of the image plane.

13. A system comprising:

an optical element that comprises a pupil defining element configured to receive a beam and to generate a plurality of beams, therefrom;

a relay having a first and second lens arrays arranged in series, wherein the first lens array receives the plurality of beams and the second lens array directly receives from the first lens array the plurality of beams that pass through the first lens array and re-images the plurality of beams onto an image plane as a plurality of corresponding beams to produce a plurality of corresponding beams;

another relay configured to receive and to direct a condensed plurality of beams onto an array of individually controllable elements, wherein the condensed plurality of beams is based on the plurality of corresponding beams; and

an optical system located after the relay and the another relay and configured to condition the condensed plurality of beams.

14. The system of claim 13, further comprising:

a projection system configured to project a patterned beam from the array of individually controllable elements onto a target portion of a substrate.

15. The system of claim 13, wherein the optical element comprises at least one of a diffractive optical element and a refractive optical element.

16. The system of claim 13, wherein the first and second lens arrays comprise fly'"'"'s eye lenses.

17. The system of claim 13, wherein the first and second lens arrays are configured to maintain a double telecentricity within the system.

18. The system of claim 13, wherein the relay is configured to direct each corresponding beam in the plurality of corresponding beams onto corresponding portions of the another relay.