Method and material for cleaning a substrate

• US 7,862,662 B2
• Filed: 09/15/2006
• Issued: 01/04/2011
• Est. Priority Date: 12/30/2005
• Status: Expired due to Fees

• Current Assignee: Lam Research Corporation
• Original Assignee: Lam Research Corporation
• Inventors: Korolik, Mikhail, de Larios, John M., Redeker, Fred C., Mikhaylichenko, Katrina, Freer, Erik M., Ravkin, Michael
• Primary Examiner(s): Kornakov; Michael
• Assistant Examiner(s): GOLIGHTLY, ERIC WAYNE
• Application Number:
  US11/532,491
• Publication Number:
  US 20090308410A1
• Time in Patent Office: 1,572 Days
• Field of Search: None
• US Class Current: 134/34
• CPC Class Codes: B08B 3/04 Cleaning involving contact with liquid
• CPC Class Codes: B08B 7/00 Cleaning by methods not provided for in a single other subclass or a single group in this subclass
• CPC Class Codes: C11D 17/0013 Liquid compositions with insoluble particles in suspension C11D17/0021, C11D17/0026, C11D17/003 take precedence
• CPC Class Codes: C11D 17/0017 Multi-phase liquid compositions
• CPC Class Codes: C11D 2111/22 Electronic devices, e.g. PCBs or semiconductors
• CPC Class Codes: G03F 1/82 Auxiliary processes, e.g. cleaning or inspecting
• CPC Class Codes: H01L 21/02052 Wet cleaning only H01L21/02085 takes precedence
• CPC Class Codes: H01L 21/02057 Cleaning during device manufacture
• CPC Class Codes: H01L 21/02096 only mechanical cleaning
• CPC Class Codes: H01L 21/67051 using mainly spraying means, e.g. nozzles

Abstract

Methods for cleaning using a tri-state body are disclosed. A substrate having a particle deposited thereon is provided. A tri-state body that has a solid portion, liquid portion, and a gas portion is generated. A force is applied over the tri-state body to promulgate an interaction between the solid portion and the particle. The tri-state body is removed along with the particle from the surface of the substrate. The interaction between the solid portion and the particle causing the particle to be removed along with the tri-state body.

Claims

1. A cleaning method, comprising:

providing a substrate having a surface, the surface having a particle thereon;

generating a tri-state body comprising a solid portion, a liquid portion, and a gas portion;

applying a force over the tri-state body to promulgate an interaction between the solid portion and the particle; and

removing the tri-state body along with the particle from the surface of the substrate, such that the interaction with the particle causes the particle to be removed with the tri-state body, wherein the solid portion is distributed in the liquid portion to define a plurality of hydrocarbon chains having a carboxyl group attached to one end of each of the plurality of hydrocarbon chains that are in suspension and are adverse to flocculation among the plurality of hydrocarbon chains.

2. The cleaning method, as recited in claim 1, wherein the interaction defines one of a connection or transfer of momentum between the particle and the solid portion of the tri-state body.

3. The cleaning method, as recited in claim 2, wherein if the interaction is the connection, the connection is one of adhesion or repulsion.

4. The cleaning method, as recited in claim 1, wherein the liquid portion and the gas portion define an encapsulating transport, the gas portion further substantially filling the encapsulating transport.

5. The cleaning method, as recited in claim 4, wherein the gas portion is one of a gas mixture of,

ozone (O₃), oxygen (O₂), hydrochloric acid (HCl), hydrofluoric acid (HF), nitrogen (N₂), and argon (Ar);

ozone (O₃) and nitrogen (N₂);

ozone (O₃) and argon (Ar);

ozone (O₃), oxygen (O₂) and nitrogen (N₂);

ozone (O₃), oxygen (O₂) and argon (Ar);

ozone (O₃), oxygen (O₂), nitrogen (N₂), and argon (Ar); and

oxygen (O₂), argon (Ar) and nitrogen (N₂).

6. The cleaning method, as recited in claim 4, wherein the encapsulating transport is combined with other encapsulating transports to define a foam, the encapsulating transports applying a force that causes the solid phase to come in proximity to the particle so as to facilitate the interaction with the solid portion and the particle on the surface of the substrate.

7. The cleaning method, as recited in claim 1, wherein the solid portion is defined outside of a gas phase and a liquid phase.

8. The cleaning method, as recited in claim 7, wherein the solid portion includes fatty acids.

9. The cleaning method, as recited in claim 1, wherein adjacent tri-state bodies positioned over the tri-state body apply the force.

10. The cleaning method, as recited in claim 1, wherein a lubricating layer between the solid portion provides hydrodynamic resistance to remove the contamination.

11. A cleaning method, comprising:

providing a substrate having a surface, the surface having a particle thereon;

generating a tri-state body defined by a surfactant in a substantial solid phase, a liquid portion in a liquid phase, and a gas portion in a gas phase prior to application to the substrate;

applying the tri-state body to the surface of the substrate such that the surfactant interacts with the particle; and

removing the tri-state body along with the particle from the surface of the substrate, such that the interaction between the surfactant and the particle causes the particle to be removed along with the tri-state body, wherein the liquid portion and the gas portion define an encapsulating transport, the gas portion further substantially filling the encapsulating transport, the encapsulating transport is combined with other encapsulating transports to define a foam, the encapsulating transports of the foam applying a force to the surfactant that causes the surfactant to be positioned proximate to the particle so as to initiate the interaction between the surfactant and the particle on the surface of the substrate, and the surfactant is distributed in the liquid portion to define a plurality of hydrocarbon chains having a carboxyl group attached to one end of each of the plurality of hydrocarbon chains that are in suspension and are adverse to flocculation among the plurality of hydrocarbon chains.

12. The cleaning method, as recited in claim 11, wherein the interaction defines a connection between the particle and the surfactant of the tri-state body.

13. The cleaning method, as recited in claim 11, further comprising:

activating the suspension of the surfactant through an application of a base to the tri-state body.