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Method and material for cleaning a substrate

  • US 7,862,662 B2
  • Filed: 09/15/2006
  • Issued: 01/04/2011
  • Est. Priority Date: 12/30/2005
  • Status: Expired due to Fees
First Claim
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1. A cleaning method, comprising:

  • providing a substrate having a surface, the surface having a particle thereon;

    generating a tri-state body comprising a solid portion, a liquid portion, and a gas portion;

    applying a force over the tri-state body to promulgate an interaction between the solid portion and the particle; and

    removing the tri-state body along with the particle from the surface of the substrate, such that the interaction with the particle causes the particle to be removed with the tri-state body, wherein the solid portion is distributed in the liquid portion to define a plurality of hydrocarbon chains having a carboxyl group attached to one end of each of the plurality of hydrocarbon chains that are in suspension and are adverse to flocculation among the plurality of hydrocarbon chains.

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