Method for manufacturing a probe
First Claim
1. A probe manufacturing method comprising the steps of:
- forming a sacrificial layer on a base table;
partially removing said sacrificial layer so as to form a recess in said sacrificial layer;
forming on said sacrificial layer a mask that exposes an area formed in a desired probe flat surface shape containing said recess on said sacrificial layer;
depositing in said area exposed from said mask a probe material exhibiting different etching resistance characteristics from those of said sacrificial layer to form a coupling portion corresponding to said recess and a probe that is integral with said coupling portion;
after removing said mask, removing said sacrificial layer with use of etchant against which said probe material exhibits more excellent etching resistance characteristics than said sacrificial layer does; and
detaching from said base table said probe held on said base table at said coupling portion together with said coupling portion.
1 Assignment
0 Petitions
Accused Products
Abstract
The present invention provides a probe manufacturing method in which, after a metal material for a probe is deposited on a base table, the probe can be detached from the base table relatively easily. A sacrificial layer is formed on a base table. The sacrificial layer is partially removed so as to form a recess in the sacrificial layer. A mask that exposes an area formed in a desired probe flat surface shape containing the recess is formed on the sacrificial layer. A probe material exhibiting different etching resistance characteristics from those of the sacrificial layer is deposited in the area exposed from the mask. By the deposition of the material, a coupling portion corresponding to the recess and a probe that is integral with the coupling portion are formed. After the mask is removed, the sacrificial layer is removed with use of etchant. Thereafter, the probe held on the base table at the coupling portion is detached from the base table together with the coupling portion.
-
Citations
10 Claims
-
1. A probe manufacturing method comprising the steps of:
-
forming a sacrificial layer on a base table; partially removing said sacrificial layer so as to form a recess in said sacrificial layer; forming on said sacrificial layer a mask that exposes an area formed in a desired probe flat surface shape containing said recess on said sacrificial layer; depositing in said area exposed from said mask a probe material exhibiting different etching resistance characteristics from those of said sacrificial layer to form a coupling portion corresponding to said recess and a probe that is integral with said coupling portion; after removing said mask, removing said sacrificial layer with use of etchant against which said probe material exhibits more excellent etching resistance characteristics than said sacrificial layer does; and detaching from said base table said probe held on said base table at said coupling portion together with said coupling portion. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10)
-
Specification