Method for making a multiple-wavelength opto-electronic device including a superlattice

• US 7,863,066 B2
• Filed: 02/16/2007
• Issued: 01/04/2011
• Est. Priority Date: 02/16/2007
• Status: Active Grant

• Current Assignee: Atomera Incorporated
• Original Assignee: Mears Technologies Incorporated
• Inventors: Dukovski, Ilija, Halilov, Samed, Hytha, Marek, Mears, Robert J., Huang, Xiangyang, Yiptong, Jean Augustin Chan Sow Fook, Stephenson, Robert John
• Primary Examiner(s): Cao; Phat X
• Assistant Examiner(s): Doan; Nga
• Application Number:
  US11/675,846
• Publication Number:
  US 20080197341A1
• Time in Patent Office: 1,418 Days
• Field of Search: 438/35, 438/29, 257/15, 257/18, 257/21
• US Class Current: 438/35
• CPC Class Codes: B82Y 20/00 Nanooptics, e.g. quantum optics or photonic crystals
• CPC Class Codes: H01L 31/022466 made of transparent conductive layers, e.g. TCO, ITO layers
• CPC Class Codes: H01L 31/028 including, apart from doping material or other impurities, only elements of Group IV of the Periodic Table
• CPC Class Codes: H01L 31/0304 including, apart from doping materials or other impurities, only AIIIBV compounds
• CPC Class Codes: H01L 31/035236 Superlattices; Multiple quantum well structures
• CPC Class Codes: H01L 31/0725 Multiple junction or tandem solar cells
• CPC Class Codes: H01L 31/18 Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
• CPC Class Codes: H01L 31/1884 Manufacture of transparent electrodes, e.g. TCO, ITO
• CPC Class Codes: H01L 33/06 within the light emitting region, e.g. quantum confinement structure or tunnel barrier
• CPC Class Codes: Y02E 10/50 Photovoltaic [PV] energy

Abstract

A method for making a multiple-wavelength opto-electronic device which may include providing a substrates and forming a plurality of active optical devices to be carried by the substrate and operating at different respective wavelengths. Moreover, each optical device may include a superlattice comprising a plurality of stacked groups of layers, and each group of layers may include a plurality of stacked semiconductor monolayers defining a base semiconductor portion and at least one non-semiconductor monolayer thereon.

Claims

1. A method for making a multiple-wavelength opto-electronic device comprising:

providing a substrate;

forming a plurality of active optical devices to be carried by the substrate and stacked in a vertical direction, the plurality of active optical devices operating at different respective wavelengths; and

each active optical device comprising a superlattice comprising a plurality of stacked groups of layers, and each group of layers comprising a plurality of stacked semiconductor monolayers defining a base semiconductor portion and at least one non-semiconductor monolayer thereon.

2. The method of claim 1 wherein the at least one non-semiconductor monolayer is constrained within a crystal lattice of adjacent base semiconductor portions, and at least some semiconductor atoms from opposing base semiconductor portions are chemically bound together through the at least one non-semiconductor monolayer therebetween.

3. The method of claim 1 wherein forming the active optical devices comprises forming respective first and second semiconductor regions on opposing sides of each superlattice, the first and second semiconductor regions having opposite conductivity types.

4. The method of claim 1 wherein the plurality of superlattices have different numbers of semiconductor monolayers in their respective base semiconductor portions.

5. The method of claim 1 wherein the active optical devices comprise optical detectors.

6. The method of claim 5 wherein the optical detectors are configured to provide an output equal to a sum of photocurrents therefrom.

7. The method of claim 1 wherein the active optical devices comprise optical transmitters.

8. The method of claim 1 wherein each superlattice has a substantially direct bandgap.

9. The method of claim 1 wherein each superlattice has a different respective bandgap.

10. The method of claim 1 further comprising forming at least one contact coupled to the plurality of active optical devices.

11. The method of claim 1 wherein the substrate comprises a semiconductor.

12. The method of claim 1 wherein the substrate comprises a non-semiconductor.

13. The method of claim 1 wherein the substrate comprises glass.

14. The method of claim 1 wherein each base semiconductor portion comprises silicon.

15. The method of claim 1 wherein each base semiconductor portion comprises a base semiconductor selected from the group consisting of Group IV semiconductors, Group III-V semiconductors, and Group II-VI semiconductors.

16. The method of claim 1 wherein each non-semiconductor monolayer comprises oxygen.

17. The method of claim 1 wherein each non-semiconductor monolayer comprises a non-semiconductor selected from the group consisting of oxygen, nitrogen, fluorine, and carbon-oxygen.

18. A method for making a multiple-wavelength opto-electronic device comprising:

providing a substrate;

forming a plurality of active optical detectors to be carried by the substrate and stacked in a vertical direction, the active optical detectors operating at different respective wavelengths;

each active optical detector comprising a superlattice comprising a plurality of stacked groups of layers, and each group of layers comprising a plurality of stacked semiconductor monolayers defining a base semiconductor portion and at least one non-semiconductor monolayer thereon, wherein the at least one non-semiconductor monolayer is constrained within a crystal lattice of adjacent base semiconductor portions, and at least some semiconductor atoms from opposing base semiconductor portions are chemically bound together through the at least one non-semiconductor monolayer therebetween.

19. The method of claim 18 wherein forming the active optical detectors comprises forming respective first and second semiconductor regions on opposing sides of each superlattice, the first and second semiconductor regions having opposite conductivity types.

20. The method of claim 18 wherein the plurality of superlattices have different numbers of semiconductor monolayers in their respective base semiconductor portions.

21. The method of claim 18 wherein the optical detectors are configured to provide an output equal to a sum of photocurrents therefrom.

22. The method of claim 18 wherein the substrate comprises a semiconductor.

23. The method of claim 18 wherein the substrate comprises a non-semiconductor.

24. The method of claim 18 wherein each base semiconductor portion comprises silicon.

25. The method of claim 18 wherein each non-semiconductor monolayer comprises oxygen.