Merged field effect transistor cells for switching

• US 7,863,691 B2
• Filed: 03/10/2008
• Issued: 01/04/2011
• Est. Priority Date: 03/10/2008
• Status: Expired due to Fees

• Current Assignee: International Business Machines Corporation
• Original Assignee: International Business Machines Corporation
• Inventors: Wagner, Lawrence F. Jr., Wolf, Randy L.
• Primary Examiner(s): Pizarro; Marcos D.
• Assistant Examiner(s): MONTALVO, EVA Y
• Application Number:
  US12/045,159
• Publication Number:
  US 20090224334A1
• Time in Patent Office: 1,030 Days
• Field of Search: 257/393, 257/401
• US Class Current: 257/401
• CPC Class Codes: H01L 27/0705 comprising components of the field effect type
• CPC Class Codes: H01L 27/1203 the substrate comprising an insulating body on a semiconductor body, e.g. SOI three-dimensional layout H01L27/0688

Abstract

Disclosed are embodiments of an improved integrated circuit switching device that incorporates multiple sets of series connected field effect transistors with each set further connected in parallel between two nodes. The sets are arranged in a linear fashion with each set positioned such that it is in contact with and essentially symmetrical relative to an adjacent set. Arranging the sets in this manner allows adjacent diffusion regions of the same type (i.e., sources or drains) from adjacent sets to be merged. Merging of the diffusion regions provides several benefits, including but not limited to, reducing the device size, reducing the amount of required wiring for the device (i.e., reducing resistance) and reducing side capacitance between the now merged diffusion regions and the substrate. Also disclosed are embodiments of an associated design structure for the device and an associated method of forming the device.

Claims

1. An integrated circuit device comprising:

a first node;

a second node; and

multiple sets of series connected field effect transistors,

wherein each one of said multiple sets comprises;

a first field effect transistor having a first diffusion region electrically connected to said first node; and

a last field effect transistor having a last diffusion region electrically connected to said second node such that said multiple sets are connected in parallel between said first node and said second node, and

wherein at least one of said first diffusion region and said last diffusion region of each set of said multiple sets comprises a shared diffusion region with an adjacent set.

2. The integrated circuit device according to claim 1, all the limitations of which are incorporated herein by reference, wherein each of said multiple sets is positioned adjacent to at least one other set such that all gates of all of said field effect transistors in all of said multiple sets are parallel and aligned.

3. The integrated circuit device according to claim 2, all the limitations of which are incorporated herein by reference, wherein each two adjacent sets of said multiple sets are arranged essentially symmetrically such that a signal will pass through a first set in a first direction and through a second set adjacent to said first set in a second direction opposite said first direction.

4. The integrated circuit device according to claim 1, all the limitations of which are incorporated herein by reference, wherein said first node comprises a current source having an specified voltage peak,

wherein said second node comprises ground,

wherein each of said field effect transistors in each of said multiple sets is rated for a specified voltage, and

wherein a number of said field effect transistors in each of said multiple sets is approximately equal to said specified voltage peak divided by said specified voltage so that a voltage drop that occurs when said integrated circuit device is turned off is shared between said field effect transistors.

5. The integrated circuit device according to claim 1, all the limitations of which are incorporated herein by reference, wherein a number of said multiple sets is approximately equal to a desired overall channel width for said integrated circuit device divided by a channel width for each of said field effect transistors.

6. The integrated circuit device according to claim 1, all the limitations of which are incorporated herein by reference, wherein shared diffusion regions between adjacent sets of said multiple sets reduce wiring requirements and, thereby minimize series resistance when said integrated circuit device is turned on.

7. The integrated circuit device according to claim 1, all the limitations of which are incorporated herein by reference, wherein shared diffusion regions between adjacent sets of said multiple sets allow a size of said integrated circuit device to be scaled and, thereby minimize parasitic capacitance.

8. A method of forming an integrated circuit device comprising:

providing a wafer;

forming on said wafer multiple sets of series connected field effect transistors such that each set comprises a first field effect transistor having a first diffusion region and a last field effect transistor having a last diffusion region and further such that at least one of said first diffusion region and said last diffusion region of each of said multiple sets comprises a shared diffusion region with an adjacent set; and

electrically connecting said multiple sets in parallel between a first node and a second node by electrically connecting said first diffusion region of each of said multiple sets to said first node and said last diffusion region of each of said multiple sets to said second node.

9. The method according to claim 8, all the limitations of which are incorporated herein by reference, wherein said forming of said multiple sets further comprises, arranging said multiple sets on said wafer such that each set is in contact with and essentially symmetrical relative to at least one adjacent set and further such that all gates of all of said field effect transistors in all of said multiple sets are parallel and aligned.

10. The method according to claim 9, all the limitations of which are incorporated herein by reference, wherein said arranging ensures that a signal will pass through a first set in a first direction and through a second set adjacent to said first set in a second direction opposite said first direction.

11. The method according to claim 8, all the limitations of which are incorporated herein by reference, further comprising, before said forming of said multiple sets:

specifying a current source;

determining a voltage peak for said current source;

specifying a field effect transistor to be used in said device;

determining a voltage at which said field effect transistor is rated; and

predetermining a number of said field effect transistors to be connected in series in each of said multiple sets by dividing said voltage peak by said voltage so that, when said integrated circuit device is turned off, a voltage drop that occurs is shared between said field effect transistors.

12. The method according to claim 8, all the limitations of which are incorporated herein by reference, further comprising, before said forming of said multiple sets:

determining a desired overall channel width for said integrated circuit device;

specifying a field effect transistor to be used in said integrated circuit device;

determining a channel width of said field effect transistor; and

predetermining a number of said multiple sets to be incorporated into said integrated circuit device by dividing said desired overall channel width by said channel width.

13. The method according to claim 8, all the limitations of which are incorporated herein by reference, wherein shared diffusion regions between adjacent sets of said multiple sets reduce wiring requirements and, thereby minimize series resistance when said integrated circuit device is turned on.

14. The method according to claim 8, all the limitations of which are incorporated herein by reference, wherein shared diffusion regions between adjacent sets of said multiple sets allow a size of said integrated circuit device to be scaled and, thereby minimize parasitic capacitance.

15. A design structure embodied in a machine readable medium, said design structure comprising an integrated circuit device, said integrated circuit device comprising:

a first node;

a second node; and

multiple sets of series connected field effect transistors,

wherein each one of said multiple sets comprises;

a first field effect transistor having a first diffusion region electrically connected to said first node; and

a last field effect transistor having a last diffusion region electrically connected to said second node such that said multiple sets are connected in parallel between said first node and said second node, and

wherein at least one of said first diffusion region and said last diffusion region of each set of said multiple sets comprises a shared diffusion region with an adjacent set.

16. The design structure according to claim 15, all the limitations of which are incorporated by reference, wherein said design structure comprises a netlist.

17. The design structure according to claim 15, all the limitations of which are incorporated by reference, wherein said design structure resides on storage medium as a data format used for the exchange of layout data of integrated circuits.

18. The design structure according to claim 15, all the limitations of which are incorporated herein by reference, wherein each of said multiple sets is positioned adjacent to at least one other set such that all gates of all of said field effect transistors in all of said multiple sets are parallel and aligned and wherein each two adjacent sets of said multiple sets are arranged essentially symmetrically such that a signal will pass through a first set in a first direction and through a second set adjacent to said first set in a second direction opposite said first direction.

19. The design structure according to claim 15, all the limitations of which are incorporated herein by reference, wherein shared diffusion regions between adjacent sets of said multiple sets reduce wiring requirements and, thereby minimize series resistance when said integrated circuit device is turned on.

20. The design structure according to claim 15, all the limitations of which are incorporated herein by reference, wherein shared diffusion regions between adjacent sets of said multiple sets allow a size of said integrated circuit device to be scaled and, thereby minimize parasitic capacitance.