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Micro electro mechanical system using comb and parallel plate actuation

  • US 7,863,799 B1
  • Filed: 03/01/2008
  • Issued: 01/04/2011
  • Est. Priority Date: 03/02/2007
  • Status: Active Grant
First Claim
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1. A micro electro mechanical system, comprising:

  • a rotor structure comprising;

    a first electrically conductive surface area that is part of a first side of the rotor structure and is electrically coupled to a first bondpad,a first portion of a first torsional hinge extending out of a second side of the rotor structure and is electrically coupled to the first bondpad,a first portion of a second torsional hinge extending out of a third side, that is opposite the second side, of the rotor structure and is electrically coupled to the first bondpad, wherein the first and second torsional hinges are collinear and define an axis of rotation around which the rotor structure rotates, anda first snapping tab extending out of a fourth side of the rotor structure that is electrically coupled to the first bondpad;

    a stator structure comprising a second electrically conductive surface area that is electrically coupled to a second bondpad, wherein the rotor structure rotates from a first position to a second position due to an electrostatic force that is produced, between the first and second electrically conductive surface areas, based on a first voltage potential that is applied between the first and second bondpads;

    a second portion of the first torsional hinge, that is mechanically coupled to the stator structure and the first portion of the first torsional hinge;

    a second portion of the second torsional hinge, that is mechanically coupled to the stator structure and the first portion of the second torsional hinge, wherein the first and second torsional hinges produce a mechanical force that resists the rotation of the rotor structure; and

    a first aperture that is electrically coupled to the first bondpad and is electrically isolated from the second electrically conductive surface area, wherein the first snapping tab makes both an electrical and a mechanical contact with the first aperture when the rotor structure rotates to a third position based on a second voltage potential, that is applied between the first and second bondpads.

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