Disposable built-in self-test devices, systems and methods for testing three dimensional integrated circuits

• US 7,863,918 B2
• Filed: 11/13/2007
• Issued: 01/04/2011
• Est. Priority Date: 11/13/2007
• Status: Active Grant

• Current Assignee: International Business Machines Corporation
• Original Assignee: International Business Machines Corporation
• Inventors: Jenkins, Keith A., Kim, Seongwon
• Primary Examiner(s): Tang; Minh N
• Assistant Examiner(s): Nguyen; Trung Q
• Application Number:
  US11/939,145
• Publication Number:
  US 20090121736A1
• Time in Patent Office: 1,148 Days
• Field of Search: 324/158.1, 324760-765, 438/14, 438/17, 438/459, 438/928, 438/109, 438618-622, 257/48, 257/778, 257/777
• US Class Current: 324/750.3
• CPC Class Codes: G01R 31/2884 using dedicated test connectors, test elements or test circuits on the IC under test G01R31/2855 takes precedence
• CPC Class Codes: H01L 22/20 Sequence of activities consisting of a plurality of measurements, corrections, marking or sorting steps
• CPC Class Codes: H01L 22/32 Additional lead-in metallisation on a device or substrate, e.g. additional pads or pad portions, lines in the scribe line, sacrificed conductors arrangements for conducting electric current to or from the solid state body in operation H01L23/48
• CPC Class Codes: H01L 2924/00 Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
• CPC Class Codes: H01L 2924/0002 Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00

Abstract

A device and method for self-testing an integrated circuit layer for a three-dimensional integrated circuit includes integrally forming a disposable self-test circuit on a common substrate with a first circuit to be tested. The first circuit forms a layer in a three-dimensional integrated circuit structure. The first circuit is tested using circuitry of the self-test circuit. The self-test circuit is removed by detaching the self-test circuit from the first circuit.

Claims

1. A method for self-testing an integrated circuit layer for a three-dimensional integrated circuit, comprising:

integrally forming a disposable self-test circuit on a common substrate with a first circuit to be tested, the first circuit for forming a layer in a three-dimensional integrated circuit structure;

testing the first circuit using circuitry of the self-test circuit by employing the self-test circuit to simulate conditions of an assembled three-dimensional integrated circuit chip for which the first chip is a component; and

removing the self-test circuit by detaching the self-test circuit from the first circuit.

2. The method as recited in claim 1, wherein the integrally forming a disposable self-test circuit on a common substrate includes forming the self-test circuit and the first circuit in a same fabrication process.

3. The method as recited in claim 1, wherein the integrally forming a disposable self-test circuit on a common substrate includes forming the self-test circuit and the first circuit on a same wafer where the self-test circuit is disposed in a kerf region.

4. The method as recited in claim 1, wherein the self-test circuit includes at least one of wiring, structures, and devices to enable the first chip to function under operating conditions.

5. The method as recited in claim 1, wherein removing the self-test circuit includes dicing the common substrate.

6. The method as recited in claim 1, further comprising trimming connection wires of the first circuit.

7. The method as recited in claim 1, further comprising forming connection structures configured for connection to other layers of the three-dimensional integrated circuit chip.

8. A method for self-testing an integrated circuit layer for a three-dimensional integrated circuit, comprising:

integrally forming a disposable self-test circuit on a common substrate with a first circuit to be tested, the first circuit for forming a layer in a three-dimensional integrated circuit structure;

joining the first circuit having the self-test circuit to at least one other layer to form the three-dimensional integrated circuit structure wherein the at least one other layer and the first circuit each include a self-test circuit;

testing the three-dimensional integrated circuit structure using circuitry of the self-test circuit; and

removing the self-test circuits by detaching the self-test circuits from the first circuit and the at least one other layer by dicing all layers to remove the self-test circuits.

9. The method as recited in claim 8, wherein the integrally forming a disposable self-test circuit on a common substrate includes forming the self-test circuit and the first circuit in a same fabrication process.

10. The method as recited in claim 8, wherein the integrally forming a disposable self-test circuit on a common substrate includes forming the self-test circuit and the first circuit on a same wafer where the self-test circuit is disposed in a kerf region.

11. The method as recited in claim 8, wherein testing the first circuit using circuitry of the self-test circuit includes employing built-in self-test circuits of the self-test circuit to test one or more layers of the three-dimensional integrated circuit chip.

12. The method as recited in claim 8, wherein joining the first circuit to at least one other layer includes wafer or chip bonding the first circuit to at least one other layer.

13. An integrated circuit, comprising:

a first chip portion configured to be integrated in a three-dimensional integrated circuit structure; and

a self-test portion integrated on a same substrate with the first chip portion, the self-test portion including circuitry configured to test the first chip portion and the self-test portion being configured to be detachable from the first chip portion to permit disposal of the self-test portion after testing the first chip portion wherein the circuitry of the self-test portion includes built-in self-test circuits to simulate conditions of an assembled three-dimensional integrated circuit structure for which the first chip portion is a component.

14. The circuit as recited in claim 13, wherein the same substrate include a wafer and the self-test portion is formed in a kerf region of the wafer.

15. The circuit as recited in claim 13, wherein the self-test portion includes at least one of wiring, structures, and devices to enable the first chip portion to function under operating conditions.

16. The circuit as recited in claim 13, wherein the self-test portion includes probe pads configured for at least one of making measurements and providing power to the circuit.

17. The method as recited in claim 13, further comprising trimmable connection wires which connect the first circuit portion with the self-test portion.

18. The circuit as recited in claim 13, further comprising connection structures formed on the first circuit portion and configured for connecting to other layers of the three-dimensional integrated circuit structure.

19. A three-dimensional integrated circuit, comprising:

a first chip portion;

at least one other layer bonded to the first chip portion to form a three-dimensional integrated chip, the at least one other layer including functional devices which interact with circuitry formed on the first chip portion; and

a self-test portion integrated on a same chip substrate with the first chip portion after removal from a wafer, the self-test portion including circuitry configured to test at least the first chip portion and the self-test portion being configured to be detachable from the first chip portion by severing the chip substrate to permit disposal of the self-test portion after testing at least the first chip portion.

20. The circuit as recited in claim 19, wherein the same substrate is removed from the wafer such that the self-test circuit is formed in a kerf region of the wafer.

21. The circuit as recited in claim 19, wherein the at least one other layer includes a self-test portion integrated on a same substrate with the at least one other layer, the self-test portion including circuitry configured to test at least the at least one other layer and the self-test portion being configured to be detachable from the at least one other layer to permit disposal of the self-test portion after testing the at least one other layer.

22. The circuit as recited in claim 19, wherein the self-test circuit includes probe pads configured for at least one of making measurements and providing power to the circuit.