Tune range limiter
First Claim
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1. An impedance matching network, comprising:
- a first input port that receives radio frequency (RF) power and includes an input impedance;
an output port that provides the RF power and includes an output impedance; and
a variable capacitance module that varies the output impedance and comprisesa first variable capacitor;
a second variable capacitor;
a first motor; and
a second motor that adjusts a capacitance of the second variable capacitor, wherein a relationship between a desired value of the capacitance and an actual value of the capacitance is dependent on a capacitance of the first variable capacitor.
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Abstract
An impedance matching network includes a first input port that receives radio frequency (RF) power and includes an input impedance, an output port that provides the RF power and includes an output impedance, and a variable capacitance module that varies the output impedance. The variable capacitance module includes a first variable capacitor, a second variable capacitor, a first motor, and a second motor that adjusts a capacitance of the second variable capacitor. A relationship between a desired value of the capacitance and an actual value of the capacitance is dependent on a capacitance of the first variable capacitor.
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Citations
21 Claims
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1. An impedance matching network, comprising:
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a first input port that receives radio frequency (RF) power and includes an input impedance; an output port that provides the RF power and includes an output impedance; and a variable capacitance module that varies the output impedance and comprises a first variable capacitor; a second variable capacitor; a first motor; and a second motor that adjusts a capacitance of the second variable capacitor, wherein a relationship between a desired value of the capacitance and an actual value of the capacitance is dependent on a capacitance of the first variable capacitor. - View Dependent Claims (2, 3, 4, 5, 6, 7)
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8. An impedance matching network, comprising:
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a first input port that receives radio frequency (RF) power and includes an input impedance; an output port that provides the RF power and includes an output impedance; and a variable capacitance circuit that varies the output impedance and comprises a first variable capacitor; a second variable capacitor; a first motor that includes an output shaft that rotates to a first position wherein the first position corresponds with a first capacitance of the first variable capacitor; and a second motor that includes an output shaft that rotates to a second position wherein the second position corresponds with a second capacitance of the second variable capacitor and wherein a relationship between a desired value of the first capacitance and an actual value of the first capacitance is dependent on the second position. - View Dependent Claims (9, 10, 11, 12, 13, 14, 15)
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16. A method of operating an impedance matching network, comprising:
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receiving radio frequency (RF) power via an input that includes an input impedance; providing the RF power at an output that includes an output impedance; and adjusting first and second capacitances to vary the output impedance, wherein a relationship between a desired value of the second capacitance and an actual value of the second capacitance is dependent on the value of the first capacitance. - View Dependent Claims (17, 18, 19, 20, 21)
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Specification