Compact Littrow encoder

• US 7,864,336 B2
• Filed: 04/28/2008
• Issued: 01/04/2011
• Est. Priority Date: 04/28/2008
• Status: Active Grant

• Current Assignee: Keysight Technologies, Inc.
• Original Assignee: Agilent Technologies, Inc.
• Inventors: Prince, James
• Primary Examiner(s): Toatley; Gregory J
• Assistant Examiner(s): Richey; Scott M
• Application Number:
  US12/111,081
• Publication Number:
  US 20090268210A1
• Time in Patent Office: 981 Days
• Field of Search: 356/494, 356/499, 356/521, 250/237.G
• US Class Current: 356/499
• CPC Class Codes: G01D 5/347 using displacement encoding scales
• CPC Class Codes: G01D 5/38 by diffraction gratings
• CPC Class Codes: G03F 7/70775 Position control, e.g. interferometers or encoders for determining the stage position

Abstract

A Littrow encoder is disclosed. The encoder includes first and second interferometers and a beam splitter assembly that splits a first instrument light beam into first and second interferometer input beams and directs these beams into the first and second interferometers, respectively. Each interferometer generates a measurement beam and a reference beam and directs the measurement beam toward a grating on a surface from which the measurement beam is diffracted, the measurement beam from the first interferometer striking the surface at a Littrow angle that is the negative of the angle at which the measurement beam from the second interferometers strikes that surface. Each interferometer includes at least one intensity detector that generates a signal related to an intensity of light in a combined light beam that includes the reference and measurement beams from that interferometer.

Claims

1. An apparatus comprising:

a first interferometer;

a second interferometer; and

a beam splitter assembly that splits a first instrument light beam into first and second interferometer input beams and directs said first and second interferometer light beams into said first and second interferometers, respectively,

wherein each interferometer generates a measurement beam and a reference beam from said input beam to that interferometer and directs said measurement beam toward a surface from which said measurement beam is diffracted, said measurement beam from said first interferometer striking said surface at an angle relative to the normal to that surface that is the negative of the angle at which said measurement beam from the other of said interferometers strikes that surface and wherein each interferometer comprises an intensity detector that generates a signal related to an intensity of light in a combined light beam comprising said reference and measurement beams from that interferometer.

2. The apparatus of claim 1 wherein said angle is a Littrow angle of an optical grating on said surface.

3. The apparatus of claim 1 wherein said beam splitter assembly comprises an optical element comprising a transparent medium that is bonded to said first and second interferometers.

4. The apparatus of claim 3 wherein said optical element comprises a non-polarization dependent beam splitter.

5. The apparatus of claim 4 wherein said non-polarization-dependent beam splitter comprises a partially reflecting mirror.

6. The apparatus of claim 4 wherein said non-polarization-dependent beam splitter comprises an optical grating.

7. The apparatus of claim 1 further comprising a beam expanding optical assembly that receives a second instrument light beam characterized by a first cross-sectional area and converts said second instrument light beam to said first instrument light beam, said first instrument light beam having a cross-sectional area greater than said first cross-sectional area and being a collimated light beam.

8. The apparatus of claim 7 wherein said beam expanding optical assembly comprises an optical fiber that transmits said second instrument light beam to said apparatus and a collimating optical assembly that converts diverging light from said optical fiber to said first instrument light beam.

9. The apparatus of claim 1 wherein said first instrument light beam comprises linearly polarized light having a first wavelength.

10. The apparatus of claim 9 wherein said intensity detector in each of said interferometers comprises:

a beam splitter that separates said combined light signal generated by that interferometer core into first and second detector light signals and images each of said first and second detector light signals to a different point in space;

a phase retarder that retards a phase of said first detector light signal by 90 degrees relative to said second detector light signal;

a first polarization filter oriented to mix light of different linear polarizations in said first detector light signal; and

a second polarization filter oriented to mix light of different linear polarizations in said second detector light signal.

11. The apparatus of claim 1 wherein said first instrument light beam comprises first linearly polarized light having a first wavelength and second linearly polarized light having a second wavelength that is different from said first wavelength.

12. The apparatus of claim 11 further comprising

a beam expanding optical assembly that receives a second and a third instrument light beams transmitted on a first and a second optical fibers, respectively, said second instrument light beam being displaced in space relative to said third instrument light beam;

an optical assembly that combines said second and third instrument light beams into a fourth instrument light beam;

a beam expanding and collimating optical assembly that expands a fourth instrument light signal and collimates said fourth instrument light beam to generate said first instrument light beam.

13. The apparatus of claim 1 further comprising a housing surrounding said first interferometer, said second interferometer, and said beam splitter assembly, said housing comprising an optically transparent window positioned to pass said measurement beams generated by said first and second interferometers.

14. The apparatus of claim 13 further comprising an optical fiber that delivers a second instrument light beam to a point within said housing from a point outside of said housing and an electrical cable that delivers signals from said intensity detectors to a point outside of said housing.

15. The apparatus of claim 13 wherein said intensity detectors are located outside of said housing and said apparatus further comprises optical fibers for coupling a portion of said combined light beams from inside said housing to said intensity detectors.

16. The apparatus of claim 13 wherein said housing comprises a temperature control module that regulates the temperature in said housing.