Post-release adjustment of interferometric modulator reflectivity
First Claim
Patent Images
1. An optical display system comprising an array of interferometric modulators, each interferometric modulator comprising:
- a substrate;
an optical stack formed on the substrate;
a movable reflective layer, wherein the movable reflective layer has a plurality of etch holes;
support posts extending between the substrate and the movable reflective layer;
a cavity defined by the space between the movable reflective layer and the optical stack; and
a reflectivity modifying layer disposed on at least one surface defining the cavity of at least one but fewer than all interferometric modulators in the array, wherein the cavity and optical stack of the at least one interferometric modulator without the reflectivity modifying layer have a first reflectance spectrum with a first reflectivity peak and the cavity and optical stack of the at least one interferometric modulator with the reflectivity modifying layer have a second reflectance spectrum with a second reflectivity peak.
2 Assignments
0 Petitions
Accused Products
Abstract
In various embodiments, devices, methods, and systems for adjusting the reflectivity spectrum of a microelectromechanical systems (MEMS) device are described herein. The method comprises depositing a reflectivity modifying layer with the optical cavity of an interferometric modulator, where the reflectivity modifying layer shifts or trims the shape of the interferometric modulator'"'"'s wavelength reflectivity spectrum relative to the absence of the reflectivity modifying layer.
-
Citations
21 Claims
-
1. An optical display system comprising an array of interferometric modulators, each interferometric modulator comprising:
-
a substrate; an optical stack formed on the substrate; a movable reflective layer, wherein the movable reflective layer has a plurality of etch holes; support posts extending between the substrate and the movable reflective layer; a cavity defined by the space between the movable reflective layer and the optical stack; and a reflectivity modifying layer disposed on at least one surface defining the cavity of at least one but fewer than all interferometric modulators in the array, wherein the cavity and optical stack of the at least one interferometric modulator without the reflectivity modifying layer have a first reflectance spectrum with a first reflectivity peak and the cavity and optical stack of the at least one interferometric modulator with the reflectivity modifying layer have a second reflectance spectrum with a second reflectivity peak. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21)
-
Specification