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Multi-layer capacitive transducer

  • US 7,864,504 B1
  • Filed: 10/01/2007
  • Issued: 01/04/2011
  • Est. Priority Date: 05/17/2004
  • Status: Expired due to Fees
First Claim
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1. A capacitive transducer of multi-layered construction comprising:

  • a fixed frame;

    a rotor plate including two sides, said rotor plate being movable with respect to said fixed frame;

    a plurality of flexible springs supporting said rotor plate, the springs each including two ends, a first end of each of said springs being connected to said rotor plate and a second end of said springs being connected to spring anchor means, said spring anchor means being a constituent of said fixed frame, wherein said flexible springs include a buckling resistant feature.

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