Semiconductor memory device
First Claim
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1. A method, comprising:
- forming a switching device which includes a vertical channel spaced from a semiconductor substrate; and
forming first and second storage devices which are positioned on opposed sides of the switching device, wherein the storage devices each include a cylindrically shaped storage node, a plate electrode coupled to the storage node, and a dielectric film which is formed between the storage node and plate electrode, the storage nodes being electrically connected to the switching device.
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Abstract
A method includes forming a switching device which includes a vertical channel spaced apart from a semiconductor substrate, and forming a storage device which is positioned on opposed sides of the switching device. The storage device includes a cylindrically shaped storage node, a plate electrode coupled to the storage node, and a dielectric film which is formed between the storage node and plate electrode, the storage nodes being electrically connected to the switching device.
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Citations
5 Claims
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1. A method, comprising:
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forming a switching device which includes a vertical channel spaced from a semiconductor substrate; and forming first and second storage devices which are positioned on opposed sides of the switching device, wherein the storage devices each include a cylindrically shaped storage node, a plate electrode coupled to the storage node, and a dielectric film which is formed between the storage node and plate electrode, the storage nodes being electrically connected to the switching device. - View Dependent Claims (2, 3, 4, 5)
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Specification