Post structure, semiconductor device and light emitting device using the structure, and method for forming the same
First Claim
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1. A light emitting device, comprising:
- a semiconductor structure having a first surface and a second surface;
a light extraction structure including a plurality of holes arranged on the first surface of the semiconductor structure, and a transparent material disposed inside at least one of the plurality of holes;
a first electrode located on the second surface of the semiconductor structure;
a second electrode located on the first surface of the semiconductor structure; and
a supporting layer located on the first electrode, the supporting layer including a metallic element or a semiconductor element,wherein the transparent material comprises a dielectric,wherein a part of the transparent material extends outside of the at least one hole and has an inclined portion with respect to the first surface, andwherein the transparent material is configured to enhance a light extraction efficiency of the light emitting device.
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Abstract
A nanometer-scale post structure and a method for forming the same are disclosed. More particularly, a post structure, a light emitting device using the structure, and a method for forming the same, which is capable of forming a nanometer-scale post structure having a repetitive pattern by using an etching process, are disclosed. The method includes forming unit patterns on a substrate by use of a first material, growing a wet-etchable second material on the substrate formed with the unit patterns, and wet etching the substrate having the grown second material.
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23 Claims
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1. A light emitting device, comprising:
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a semiconductor structure having a first surface and a second surface; a light extraction structure including a plurality of holes arranged on the first surface of the semiconductor structure, and a transparent material disposed inside at least one of the plurality of holes; a first electrode located on the second surface of the semiconductor structure; a second electrode located on the first surface of the semiconductor structure; and a supporting layer located on the first electrode, the supporting layer including a metallic element or a semiconductor element, wherein the transparent material comprises a dielectric, wherein a part of the transparent material extends outside of the at least one hole and has an inclined portion with respect to the first surface, and wherein the transparent material is configured to enhance a light extraction efficiency of the light emitting device. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23)
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Specification