Semiconductor device and manufacturing method thereof
First Claim
1. A semiconductor device comprising:
- a substrate;
a transistor in a peripheral circuit, formed over the substrate;
a first insulating layer formed over the transistor;
a second insulating layer having a first opening and a second opening, the second insulating layer being over the first insulating layer;
a capacitor in the first opening, the capacitor in the peripheral circuit comprising;
a first conductive layer formed over the first insulating layer, electrically connected to the transistor, wherein an edge portion of the first conductive layer is covered with the second insulating layer;
a second conductive layer formed over the first conductive layer and the second insulating layer; and
a first organic compound layer formed between the first conductive layer and the second conductive layer and over the second insulating layer;
a memory element in the second opening, the memory element in a memory cell array comprising;
a third conductive layer formed over the first insulating layer, wherein an edge portion of the third conductive layer is covered with the second insulating layer;
a fourth conductive layer formed over the third conductive layer and the second insulating layer; and
a second organic compound layer formed between the third conductive layer and the fourth conductive layer and over the second insulating layer,wherein the memory element is electrically connected to the peripheral circuit, andwherein the first organic compound layer comprises a same material as the second organic compound layer.
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Accused Products
Abstract
An object of the invention is to reduce an area occupied by a capacitor in a circuit in a semiconductor device, and to downsize a semiconductor device on which the capacitor and an organic memory are mounted. The organic memory and the capacitor, included in a peripheral circuit, in which the same material as the layer containing the organic compound used for the organic memory is used as a dielectric, are used. The peripheral circuit here means a circuit having at least a capacitor such as a resonance circuit, a power supply circuit, a boosting circuit, a DA converter, or a protective circuit. Further, a capacitor in which a semiconductor is used as a dielectric may be provided over the same substrate as well as the capacitor in which the same material as the layer containing the organic compound is used as a dielectric. In this case, it is desirable that the capacitor in which the same material as the layer containing the organic compound is used as a dielectric and the capacitor in which the semiconductor is used as a dielectric are connected to each other in parallel. (189)
52 Citations
42 Claims
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1. A semiconductor device comprising:
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a substrate; a transistor in a peripheral circuit, formed over the substrate; a first insulating layer formed over the transistor; a second insulating layer having a first opening and a second opening, the second insulating layer being over the first insulating layer; a capacitor in the first opening, the capacitor in the peripheral circuit comprising; a first conductive layer formed over the first insulating layer, electrically connected to the transistor, wherein an edge portion of the first conductive layer is covered with the second insulating layer; a second conductive layer formed over the first conductive layer and the second insulating layer; and a first organic compound layer formed between the first conductive layer and the second conductive layer and over the second insulating layer; a memory element in the second opening, the memory element in a memory cell array comprising; a third conductive layer formed over the first insulating layer, wherein an edge portion of the third conductive layer is covered with the second insulating layer; a fourth conductive layer formed over the third conductive layer and the second insulating layer; and a second organic compound layer formed between the third conductive layer and the fourth conductive layer and over the second insulating layer, wherein the memory element is electrically connected to the peripheral circuit, and wherein the first organic compound layer comprises a same material as the second organic compound layer. - View Dependent Claims (7, 8, 9, 10, 31, 37)
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2. A semiconductor device comprising:
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a substrate; a first transistor in a peripheral circuit, formed over the substrate; a second transistor in a memory cell array, formed over the substrate; a first insulating layer formed over the first transistor and the second transistor; a second insulating layer having a first opening and a second opening, the second insulating layer being over the first insulating layer; a capacitor in the first opening, the capacitor in the peripheral circuit comprising; a first conductive layer formed over the first insulating layer, electrically connected to the first transistor, wherein an edge portion of the first conductive layer is covered with the second insulating layer; a second conductive layer formed over the first conductive layer and the second insulating layer; and a first organic compound layer formed between the first conductive layer and the second conductive layer and over the second insulating layer; a memory element in the second opening, the memory element in the memory cell array comprising; a third conductive layer formed over the first insulating layer, electrically connected to the second transistor, wherein an edge portion of the third conductive layer is covered with the second insulating layer; a fourth conductive layer formed over the third conductive layer and the second insulating layer; and a second organic compound layer formed between the third conductive layer and the fourth conductive layer and over the second insulating layer, wherein the memory element is electrically connected to the peripheral circuit, and wherein the first organic compound layer comprises a same material as the second organic compound layer. - View Dependent Claims (11, 12, 13, 14, 32, 38)
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3. A semiconductor device comprising:
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a substrate; a first transistor in a peripheral circuit, formed over the substrate; a second transistor in a memory cell array, formed over the substrate; a first insulating layer formed over the first transistor and the second transistor; a second insulating layer having a first opening and a second opening, the second insulating layer being over the first insulating layer; a capacitor in the first opening, the capacitor in the peripheral circuit comprising; a first conductive layer formed over the first insulating layer, electrically connected to the first transistor, wherein an edge portion of the first conductive layer is covered with the second insulating layer; a second conductive layer formed over the first conductive layer and the second insulating layer; and a first organic compound layer formed between the first conductive layer and the second conductive layer and over the second insulating layer; a memory element in the second opening, the memory element in the memory cell array comprising; a third conductive layer formed over the first insulating layer, electrically connected to the second transistor, wherein an edge portion of the third conductive layer is covered with the second insulating layer; a fourth conductive layer formed over the third conductive layer and the second insulating layer; and a second organic compound layer formed between the third conductive layer and the fourth conductive layer, wherein the memory element is electrically connected to the peripheral circuit, wherein the first organic compound layer comprises a same material as the second organic compound layer, and wherein a channel forming region included in the first transistor at least partly overlaps the first organic compound layer. - View Dependent Claims (15, 16, 17, 18, 33, 39)
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4. A semiconductor device comprising:
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a substrate having an insulating surface; a transistor in a peripheral circuit, formed over the substrate; a first insulating layer formed over the transistor; a second insulating layer having a first opening and a second opening, the second insulating layer being over the first insulating layer; a capacitor in the first opening, the capacitor in the peripheral circuit comprising; a first conductive layer formed over the first insulating layer, electrically connected to the transistor, wherein an edge portion of the first conductive layer is covered with the second insulating layer; a second conductive layer formed over the first conductive layer and the second insulating layer; and a first organic compound layer formed between the first conductive layer and the second conductive layer and over the second insulating layer; a memory element in the second opening, the memory element in a memory cell array comprising; a third conductive layer formed over the first insulating layer, wherein an edge portion of the third conductive layer is covered with the second insulating layer; a fourth conductive layer formed over the third conductive layer and the second insulating layer; and a second organic compound layer formed between the third conductive layer and the fourth conductive layer and over the second insulating layer, wherein the memory element is electrically connected to the peripheral circuit, and wherein the first organic compound layer comprises a same material as the second organic compound layer. - View Dependent Claims (19, 20, 21, 22, 34, 40)
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5. A semiconductor device comprising:
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a substrate having an insulating surface; a first transistor in a peripheral circuit, formed over the substrate; a second transistor in a memory cell array, formed over the substrate; a first insulating layer formed over the first transistor and the second transistor; a second insulating layer having a first opening and a second opening, the second insulating layer being over the first insulating layer; a capacitor in the first opening, the capacitor in the peripheral circuit comprising; a first conductive layer formed over the first insulating layer, electrically connected to the first transistor, wherein an edge portion of the first conductive layer is covered with the second insulating layer; a second conductive layer formed over the first conductive layer and the second insulating layer; and a first organic compound layer formed between the first conductive layer and the second conductive layer and over the second insulating layer; a memory element in the second opening, the memory element in the memory cell array comprising; a third conductive layer formed over the first insulating layer, electrically connected to the second transistor, wherein an edge portion of the third conductive layer is covered with the second insulating layer; a fourth conductive layer formed over the third conductive layer and the second insulating layer; and a second organic compound layer formed between the third conductive layer and the fourth conductive layer and over the second insulating layer, wherein the memory element is electrically connected to the peripheral circuit, and wherein the first organic compound layer comprises a same material as the second organic compound layer. - View Dependent Claims (23, 24, 25, 26, 35, 41)
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6. A semiconductor device comprising:
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a substrate having an insulating surface; a first transistor in a peripheral circuit, formed over the substrate; a second transistor in a memory cell array, formed over the substrate; a first insulating layer formed over the first transistor and the second transistor; a second insulating layer having a first opening and a second opening, the second insulating layer being over the first insulating layer; a capacitor in the first opening, the capacitor in the peripheral circuit comprising; a first conductive layer formed over the first insulating layer, electrically connected to the first transistor, wherein an edge portion of the first conductive layer is covered with the second insulating layer; a second conductive layer formed over the first conductive layer and the second insulating layer; and a first organic compound layer formed between the first conductive layer and the second conductive layer and over the second insulating layer; a memory element in the second opening, the memory element in the memory cell array comprising; a third conductive layer formed over the first insulating layer, electrically connected to the second transistor, wherein an edge portion of the third conductive layer is covered with the second insulating layer; a fourth conductive layer formed over the third conductive layer and the second insulating layer; and a second organic compound layer formed between the third conductive layer and the fourth conductive layer and over the second insulating layer, wherein the memory element is electrically connected to the peripheral circuit, wherein the first organic compound layer comprises a same material as the second organic compound layer, and wherein a channel forming region included in the first transistor at least partly overlaps the first organic compound layer. - View Dependent Claims (27, 28, 29, 30, 36, 42)
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Specification