Stage assembly with lightweight fine stage and low transmissibility

• US 7,869,000 B2
• Filed: 01/31/2005
• Issued: 01/11/2011
• Est. Priority Date: 11/02/2004
• Status: Expired due to Fees

• Current Assignee: Nikon Corporation
• Original Assignee: Nikon Corporation
• Inventors: Watson, Douglas C., Arai, Yoichi, Novak, W. Thomas, Lok, Kirk, Hazelton, Andrew J., Binnard, Michael
• Primary Examiner(s): Kim; Peter B
• Application Number:
  US11/048,405
• Publication Number:
  US 20060104753A1
• Time in Patent Office: 2,171 Days
• Field of Search: 355/72, 355/53, 355/75, 267/64.23, 359/224, 250/442.11, 250/492.2, 318/640, 310/12
• US Class Current: 355/72
• CPC Class Codes: G03F 7/70716 Stages

Abstract

A stage assembly (220) that moves a work piece (200) along a first axis, along a second axis and along a third axis includes a first stage (238), a first mover assembly (242) that moves the first stage (238) along the first axis, a second stage (240) that retains the work piece (200), a second mover assembly (244), and a non-contact bearing (257). The second mover assembly (244) moves the second stage (240) relative to the first stage (238) along the first axis, along the second axis, and along the third axis. The non-contact bearing (257) supports the mass of the second stage (240). Further, the non-contact bearing (257) allows the second stage (240) to move relative to the first stage (238) along the first axis and along the second axis. The second mover assembly (244) can move the second stage (240) with at least four degrees of movement.

Claims

1. A stage assembly that positions a work piece along a first axis, along a second axis and along a third axis, the stage assembly comprising:

a first stage;

a first mover assembly that moves the first stage along the first axis;

a second stage that retains the work piece;

a second mover assembly that moves the second stage relative to the first stage along the first axis, along the second axis, and along the third axis, the second mover assembly including a Z mover that moves the second stage relative to the first stage along the third axis; and

a non-contact bearing that supports the mass of the second stage relative to the entire Z mover, the non-contact bearing allowing the second stage to move relative to the first stage along the first axis and along the second axis.

2. The stage assembly of claim 1 wherein the second mover assembly moves the second stage with at least four degrees of movement.

3. The stage assembly of claim 1 wherein the second mover assembly moves the second stage with at least six degrees of movement.

4. The stage assembly of claim 1 wherein the Z mover includes a Z housing, a Z mover output, and a connector assembly that allows the Z mover output to tilt relative to the Z housing, and wherein the non-contact bearing supports the second stage relative to the Z mover output.

5. The stage assembly of claim 1 wherein the second mover assembly includes three spaced apart Z movers that move the second stage relative to the first stage along the third axis, about the first axis, and about the second axis, and wherein the non-contact bearing supports the second stage relative to the Z movers.

6. The stage assembly of claim 5 wherein each Z mover includes a Z housing, a Z mover output, and a connector assembly that allows the Z mover output to move relative to the Z housing about the first axis, and about the second axis, and wherein the non-contact bearing supports the second stage relative to the Z mover outputs.

7. The stage assembly of claim 1 wherein the second mover assembly includes a first mover that moves the second stage along the first axis, and a second mover that moves the second stage along the second axis, wherein each mover including a first mover component and a second mover component that interacts with the first mover component to cause movement, wherein the first mover component of the first and second movers are coupled to the first stage, the second mover component of the first and second movers are coupled to the second stage.

8. The stage assembly of claim 7 wherein the second mover component of the first and second movers are selectively coupled to the second stage.

9. The stage assembly of claim 7 wherein the second mover component of the first and second movers cantilever away from the second stage.

10. The stage assembly of claim 1 further comprising a mirror and a fastener that secures the mirror to the second stage, the mirror including a mirror surface, an attachment area, a slot that separates at least a portion of the mirror surface from the attachment area, an aperture that receives the fastener, and an attachment slot that extends between the aperture and the slot.

11. An exposure apparatus including the stage assembly of claim 1.

12. A method for manufacturing a device, the method comprising the steps of providing a substrate and transferring an image to the substrate with the exposure apparatus of claim 11.

13. A method for manufacturing a wafer, the method comprising the steps of providing a substrate and transferring an image to the substrate with the exposure apparatus of claim 11.

14. The stage assembly of claim 1 wherein the Z mover includes a first mover component and a second mover component, wherein the first mover component is coupled to the first stage and the second mover component moves relative to the first mover component, and wherein the non-contact bearing separates the second mover component from the second stage.

15. The stage assembly of claim 14 wherein one of the mover components of the Z mover includes a magnet array having one or more magnets and one of the mover components of the Z mover includes a coil array having one or more coils.

16. The stage assembly of claim 1 wherein the Z mover further includes a Z dampener that inhibits vibration from the first stage along the third axis from being transmitted to the second stage.

17. A stage assembly that positions a work piece along a first axis, along a second axis and along a third axis, the stage assembly comprising:

a first stage;

a first mover assembly that moves the first stage along the first axis and along the second axis;

a second stage that retains the work piece;

a second mover assembly including a Z mover that moves a Z mover output along the third axis and an X mover that moves the second stage along the first axis relative to the Z mover; and

a non-contact bearing that supports the second stage relative to the Z mover output so that movement of the Z mover output along the third axis results in movement of the second stage along the third axis.

18. The stage assembly of claim 17 wherein the second mover assembly moves the second stage with at least four degrees of movement.

19. The stage assembly of claim 17 wherein the second mover assembly moves the second stage with at least six degrees of movement.

20. The stage assembly of claim 17 wherein the non-contact bearing allows the second stage to move relative to the first stage along the first axis and along the second axis.

21. The stage assembly of claim 17 wherein the Z mover includes a Z housing, and a connector assembly that allows the Z mover output to tilt relative to the Z housing.

22. The stage assembly of claim 17 wherein the second mover assembly includes three spaced apart Z movers that move the second stage relative to the first stage along the third axis, about the first axis, and about the second axis, each Z mover including the Z mover output, and wherein the non-contact bearing supports the second stage relative to the Z mover outputs.

23. The stage assembly of claim 17 wherein the second mover assembly further includes a Y mover that moves the second stage along the second axis, wherein each mover including a first mover component and a second mover component that interacts with the first mover component to cause movement, wherein the first mover component of the X and Y movers are coupled to the first stage, the second mover component of the X and Y movers are coupled to the second stage.

24. The stage assembly of claim 23 wherein the second mover component of the X and Y movers are selectively coupled to the second stage.

25. The stage assembly of claim 23 wherein the second mover component of the X and Y movers cantilever away from the second stage.

26. The stage assembly of claim 17 wherein the Z mover includes a Z dampener that inhibits vibration from the first stage along the third axis from being transmitted to the second stage.

27. An exposure apparatus including the stage assembly of claim 17.

28. The stage assembly of claim 17 wherein the Z mover includes a first mover component and a second mover component, wherein the first mover component is coupled to the first stage and the second mover component moves relative to the first mover component, and wherein the non-contact bearing separates the second mover component from the second stage.

29. The stage assembly of claim 28 wherein one of the mover components of the Z mover includes a magnet array having one or more magnets and one of the mover components of the Z mover includes a coil array having one or more coils.

30. The stage assembly of claim 17 wherein the Z mover further includes a Z dampener that inhibits vibration from the first stage along the third axis from being transmitted to the second stage.

31. A stage assembly that positions a work piece along a first axis, along a second axis and along a third axis, the stage assembly comprising:

a first stage;

a first mover assembly that moves the first stage along the first axis and along the second axis;

a second stage that retains the work piece;

a second mover assembly including a Z mover having a first mover component, a second mover component that interacts with the first mover component to move the second stage relative to the first stage along the third axis, and a Z dampener that inhibits vibration from the first stage along the third axis from being transmitted to the second stage, the Z dampener inhibiting rotation of at least a portion of the Z mover about the third axis; and

a non-contact bearing that supports the mass of the second stage relative to the Z mover, the non-contact bearing allowing the second stage to move relative to the first stage along the first axis and along the second axis.

32. The stage assembly of claim 31 wherein the Z dampener includes a fluid bellows.

33. The stage assembly of claim 31 wherein the second mover assembly further includes an X mover that moves the second stage along the first axis, and a Y mover that moves the second stage along the second axis, wherein each mover including a first mover component and a second mover component that interacts with the first mover component to cause movement, wherein the first mover component of the X and Y movers are coupled to the first stage, the second mover component of the X and Y movers are coupled to the second stage, and both mover components of the Z mover are coupled to the first stage.

34. An exposure apparatus including the stage assembly of claim 31.

35. The stage assembly of claim 31 wherein the Z mover includes a Z beam that supports a portion of the second mover component and a Z frame that supports the first mover component.

36. The stage assembly of claim 35 wherein the Z dampener is secured to the Z beam and the Z frame.

37. The stage assembly of claim 36 wherein the Z dampener supports the weight of the Z beam and allows the Z beam to move relative to the Z frame.

38. The stage assembly of claim 31 wherein the Z dampener is sealed relative to the rest of the Z mover.

39. The stage assembly of claim 31 wherein the first mover component is coupled to the first stage and the second mover component moves relative to the first mover component, and wherein the non-contact bearing separates the second mover component from the second stage.

40. A stage device that positions a work piece along a first axis, along a second axis and along a third axis, the stage device comprising:

a supporting member;

a movable member that retains the work piece;

a mover device that moves the movable member relative to the supporting member along the first axis, along the second axis, and along the third axis, the mover device having a first mover that has a first part connected to a first mover output and a second part that interacts with the first part to generate driving force and moves the first mover output relative to the supporting member along the third axis by using the driving force, the first and second parts of the first mover are connected to the supporting member; and

a non-contact bearing that supports the mass of the movable member relative to the first mover output, the non-contact bearing allowing the movable member to move relative to the supporting member along the first axis and along the second axis.

41. The stage device of claim 40 wherein the mover device has a dampener that supports the first part of the first mover and allows the first part of the first mover to move relative to the second part of the first mover along a third axis.

42. The stage device of claims 41, wherein the first part of the first mover is coupled to the supporting member with support of the dampener and wherein the second part of the first mover is coupled to the supporting member without support of the dampener.

43. The stage device of claim 40 wherein the mover device has a second mover that has a third part and a fourth part that interacts with the third part to generate the second driving force along the first axis and moves the movable member relative to the supporting member along the first axis by using the second driving force, the third part of the second mover is connected to the movable member and the fourth part of the second mover is connected to the supporting member.

44. An exposure apparatus including the stage device of claim 40.

45. A method for manufacturing a device comprising:

exposing a substrate by using the exposure apparatus as defined in claim 40; and

developing the exposed substrate to manufacture the device.

46. A positioning method for positioning a work piece along a first axis, along a second axis and along a third axis, the method comprising the steps of:

providing a supporting member;

retaining the work piece on a movable member;

moving the movable member relative to the supporting member by a mover device along the first axis, along the second axis, and along the third axis, the mover device having a first mover that has a first part connected to a first mover output and a second part that interacts with the first part to generate driving force and moves the first mover output relative to the supporting member along the third axis by using the driving force, the first and second parts of the first mover are connected to the supporting member; and

supporting the mass of the movable member relative to the first mover output by a non-contact bearing which allows the movable member to move relative to the supporting member along the first axis and along the second axis.

47. An exposure method which forms a pattern on a substrate, the method comprising:

positioning the substrate by using the positioning method of claim 46, wherein work piece is the substrate; and

exposing substrate.

48. A method for manufacturing a device comprising:

exposing a substrate by using the exposure method as defined in claim 47; and

developing the exposed substrate to manufacture the device.

49. A stage assembly that positions a work piece along a first axis, along a second axis and along a third axis, the stage assembly comprising:

a first stage;

a first mover assembly that moves the first stage along the first axis and along the second axis;

a second stage that retains the work piece; and

a second mover assembly including a Z mover having a first mover component, a second mover component that interacts with the first mover component to move the second stage relative to the first stage along the third axis, and a Z dampener that inhibits vibration from the first stage along the third axis from being transmitted to the second stage, the Z dampener inhibiting rotation of at least a portion of the Z mover about the third axis; and

wherein the Z mover includes a Z housing, a Z mover output, and a connector assembly that allows the Z mover output to tilt relative to the Z housing.

50. A stage assembly that positions a work piece along a first axis, along a second axis and along a third axis, the stage assembly comprising:

a first stage;

a first mover assembly that moves the first stage along the first axis and along the second axis;

a second stage that retains the work piece; and

a second mover assembly including a Z mover having a first mover component, a second mover component that interacts with the first mover component to move the second stage relative to the first stage along the third axis, and a Z dampener that inhibits vibration from the first stage along the third axis from being transmitted to the second stage, the Z dampener inhibiting rotation of at least a portion of the Z mover about the third axis; and

wherein the Z dampener supports the mass of the Z mover.

51. A stage assembly that positions a work piece along a first axis, along a second axis and along a third axis, the stage assembly comprising:

a first stage;

a first mover assembly that moves the first stage along the first axis and along the second axis;

a second stage that retains the work piece; and

a second mover assembly including a Z mover having a first mover component, a second mover component that interacts with the first mover component to move the second stage relative to the first stage along the third axis, a Z beam that supports a portion of the second mover component, a Z frame that supports the first mover component, a Z bearing that guides the movement of the Z beam relative to the Z frame along the third axis and a Z dampener that inhibits vibration from the first stage along the third axis from being transmitted to the second stage, the Z dampener being secured to the Z beam and the Z frame, the Z dampener supporting the weight of the Z beam and allowing the Z beam to move relative to the Z frame, the Z dampener inhibiting rotation of at least a portion of the Z mover about the third axis.