Analysis apparatus for analyzing a specimen by obtaining electromagnetic spectrum information

• US 7,869,036 B2
• Filed: 08/21/2008
• Issued: 01/11/2011
• Est. Priority Date: 08/31/2007
• Status: Expired due to Fees

• Current Assignee: Canon Kabushiki Kaisha (Canon Inc.)
• Original Assignee: Canon Kabushiki Kaisha (Canon Inc.)
• Inventors: Kajiki, Kousuke, Ouchi, Toshihiko, Sekiguchi, Ryota
• Primary Examiner(s): EVANS, FANNIE L
• Application Number:
  US12/196,224
• Publication Number:
  US 20090059226A1
• Time in Patent Office: 873 Days
• Field of Search: 356/326, 356/328
• US Class Current: 356/328
• CPC Class Codes: G01J 3/02 Details
• CPC Class Codes: G01J 3/0218 using optical fibers
• CPC Class Codes: G01J 3/20 Rowland circle spectrometers
• CPC Class Codes: G01J 3/36 Investigating two or more bands of a spectrum by separate detectors
• CPC Class Codes: G01J 3/42 Absorption spectrometry; Double beam spectrometry; Flicker spectrometry; Reflection spectrometry beam switching arrangements G01J3/08
• CPC Class Codes: G01N 21/31 Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry G01N21/72 takes precedence
• CPC Class Codes: G01N 21/3563 for analysing solids; Preparation of samples therefor
• CPC Class Codes: G01N 21/8901 Optical details; Scanning details per se G02B

Abstract

An analysis apparatus for analyzing a specimen comprises a spectral separator for dispersing spatially an electromagnetic wave introduced from the specimen into spectral components, a sensing element array containing plural sensing elements for sensing the spectral components of the electromagnetic wave dispersed spatially by the spectral separator, and a spectrum calculator for calculating the spectrum from the signal sensed by the sensing elements; the sensing element array having sensitivities different to each of the spectral components of the electromagnetic wave dispersed spatially by the spectral separator, and the spectral separator and the sensing element array being placed so as to receive the spectral components by each of the sensing elements at different incident angles.

Claims

1. An analysis apparatus for analyzing a specimen, comprising:

a spectral separator for dispersing spatially an electromagnetic wave from the specimen into spectral components;

a sensing element array containing plural sensing elements for sensing the spectral components of the electromagnetic wave dispersed spatially by the spectral separator; and

a spectrum calculator for calculating a spectrum based on a signal from the sensing elements;

wherein the spectral separator and the sensing element array are placed so that the incident angles of the spectral components dispersed spatially by the spectral separator to the sensor elements are different for each of the sensing elements,

wherein the sensing element has an electromagnetic wave sensor and a filter for selecting the wavelength range for sensing the electromagnetic wave introduced from the specimen,

wherein the filter comprises a negative dielectric medium having a negative real part and a second medium,

wherein the negative dielectric medium and the second medium are placed at a distance of not more than the wavelength of the electromagnetic wave to be sensed, and

wherein the filter and the electromagnetic wave sensor are placed at a distance of not more than the wavelength of the electromagnetic wave to be sensed.

2. The analysis apparatus according to claim 1, wherein the spectral separator and the sensing element array are placed so as to introduce the spectral components to each of the sensing elements at incident angles to maximize the sensitivity of each of the sensing elements.

3. The analysis apparatus according to claim 1, wherein the electromagnetic wave covers at least a part of a frequency range from 30 GHz to 30 THz.

4. The analysis apparatus according to claim 1, wherein the sensing element array has a plurality of the sensing element placed on a Rowland circle in accordance with the wavelength dispersion characteristics of the spectral separator.

5. The analysis apparatus according to claim 1, wherein the apparatus has a means for compensating deviation of the incident angle or incident position of the electromagnetic wave onto the sensing element.

6. The analysis apparatus according to claim 1, wherein the sensing element array receives the electromagnetic wave from a linear region of the specimen;

and the spectrum calculator calculates spectra at plural positions in the linear region.

7. The analysis apparatus according to claim 1, wherein the apparatus has a fiber array;

the fiber array receives the electromagnetic wave dispersed spatially into spectral components by the spectral separator and transmits the received electromagnetic wave to the sensing element array; and

the electromagnetic wave leaving the fiber array is introduced to the sensing element to obtain the maximum sensitivity to the sensing element which is designed to give the maximum sensitivity to each of the wavelengths.

8. The analysis apparatus according to claim 1, wherein at least one of the spectral separator and the sensing element array are integrated into a unit, and the unit is exchangeable.

9. The analysis apparatus according to claim 1, wherein the apparatus has a means for projecting the electromagnetic wave onto the specimen.

10. An analysis apparatus for analyzing a specimen, comprising:

a generator for generating an electromagnetic wave;

a diffraction grating for dispersing spatially an electromagnetic wave from the generator into spectral components;

a sensing element array having a plurality of plasmon type sensing elements for sensing the spectral components of the electromagnetic wave dispersed spatially by the diffraction grating; and

a spectrum calculator for calculating a spectrum based on a signal from the sensing elements,

wherein each of the sensing elements is configured to maximize a sensitivity for detecting each of the spectral components of the electromagnetic wave separated spatially by the diffraction grating, and

wherein the diffraction grating and the sensing element array are placed so as to receive the spatially dispersed spectral components by the sensing elements at incident angles to maximize the sensitivities of each of the sensing elements.