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Process control monitors for interferometric modulators

  • US 7,869,055 B2
  • Filed: 08/20/2007
  • Issued: 01/11/2011
  • Est. Priority Date: 09/27/2004
  • Status: Expired due to Fees
First Claim
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1. A wafer, comprising:

  • a plurality of interferometric modulators used in a display, the interferometric modulators comprising a plurality of material layers comprising a first mechanical membrane having a plurality of holes; and

    a process control monitor that reflects incident light and provides information regarding processes used to manufacture the interferometric modulators, wherein the process control monitor comprises one or more of the material layers but less than all of the plurality of material layers, wherein the process control monitor comprises a second mechanical membrane with more holes than the first mechanical membrane of the interferometric modulators.

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