Additives to prevent degradation of cyclic alkene derivatives
First Claim
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1. A composition, comprising:
- (a) one or more substituted or unsubstituted cyclic alkenes, and(b) an antioxidant composition comprising at least one compound of Formula (I),
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Abstract
This disclosure relates to compositions that includes (a) one or more substituted or unsubstituted cyclic alkenes, and (b) an antioxidant composition including at least one compound of Formula (I):
R1 through R4 in Formula (I) are described in the specification.
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36 Claims
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1. A composition, comprising:
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(a) one or more substituted or unsubstituted cyclic alkenes, and (b) an antioxidant composition comprising at least one compound of Formula (I), - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12)
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13. A process, comprising treating a substrate in a film deposition chamber with at least one cyclic alkene composition and at least one silicon containing compound to form a carbon doped silicon oxide film on the substrate,
wherein the cyclic alkene composition comprises: -
(a) one or more substituted or unsubstituted cyclic alkenes, and (b) an antioxidant composition comprising at least one compound of Formula (I), - View Dependent Claims (14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24, 25, 26, 27)
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28. A composition, comprising:
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(a) a cyclic alkene selected from the group consisting of dipentene, phellandrene, dicyclopentadiene, alpha-terpinene, gamma-terpinene, limonene, alpha-pinene, 3-carene, terpinolene, norbornene, norbornadiene, 5-vinyl-2-norbornene, and 5-ethyl idene-2-norbornene, and (b) an antioxidant composition comprising 4-methyl-1,2-dihydroxybenzene or 3-methoxy-1,2-dihydroxybenzene, wherein the antioxidant composition is present in a concentration between about 50 ppm and about 150 ppm. - View Dependent Claims (29, 30)
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31. A process, comprising treating a substrate in a film deposition chamber with at least one cyclic alkene composition and at least one silicon containing compound to form a carbon doped silicon oxide film on the substrate,
wherein the cyclic alkene composition comprises: -
(a) a cyclic alkene selected from the group consisting of dipentene, phellandrene, dicyclopentadiene, alpha-terpinene, gamma-terpinene, limonene, alpha-pinene, 3-carene, terpinolene, norbornene, norbornadiene, 5-vinyl-2-norbornene, and 5-ethylidene-2-norbornene, and (b) an antioxidant composition comprising 4-methyl-1,2-dihydroxybenzene or 3-methoxy-1,2-dihydroxybenzene, wherein the antioxidant composition is present in a concentration between about 50 ppm and about 150 ppm.
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32. A process, comprising:
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storing a cyclic alkene composition in a sealed container for at least 6 months, and after storing the cyclic alkene composition, using the cyclic alkene composition together with at least one silicon-containing compound in a chemical vapor deposition process to form a carbon doped silicon oxide film on a substrate, wherein the cyclic alkene composition comprises; (a) one or more substituted or unsubstituted cyclic alkenes, and (b) an antioxidant composition comprising at least one compound of Formula (I),
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33. A process for stabilizing a cyclic alkene, comprising:
adding an antioxidant composition comprising at least one compound of Formula (I) to the cyclic alkene, - View Dependent Claims (34, 35, 36)
Specification