Shielded gate trench FET with an inter-electrode dielectric having a nitride layer therein
First Claim
Patent Images
1. A shielded gate field effect transistor (FET), comprising:
- a plurality of trenches extending into a semiconductor region;
a shield electrode in a bottom portion of each trench;
a gate electrode over the shield electrode; and
an inter-electrode dielectric (IED) extending between the shield electrode and the gate electrode, the IED comprising;
(i) a first oxide layer, and(ii) a nitride layer over the first oxide layer.
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Abstract
A shielded gate field effect transistor (FET) comprises a plurality of trenches extending into a semiconductor region. A shield electrode is disposed in a bottom portion of each trench, and a gate electrode is disposed over the shield electrode in each trench. An inter-electrode dielectric (IED) extends between the shield electrode and the gate electrode. The IED comprises a first oxide layer and a nitride layer over the first oxide layer.
17 Citations
24 Claims
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1. A shielded gate field effect transistor (FET), comprising:
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a plurality of trenches extending into a semiconductor region; a shield electrode in a bottom portion of each trench; a gate electrode over the shield electrode; and an inter-electrode dielectric (IED) extending between the shield electrode and the gate electrode, the IED comprising; (i) a first oxide layer, and (ii) a nitride layer over the first oxide layer. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14)
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15. A shielded gate field effect transistor (FET), comprising:
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a plurality of trenches extending into a semiconductor region; a shield electrode in a bottom portion of each trench; a gate electrode over the shield electrode; and an inter-electrode dielectric (IED) extending between the shield electrode and the gate electrode, the IED comprising; (i) a first oxide layer, and (ii) a nitride layer over the first oxide layer, wherein the nitride layer laterally extends between the shield electrode and the gate electrode, the nitride layer having outer portions that extend downward. - View Dependent Claims (16, 17, 18, 19, 20, 21, 22, 23, 24)
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Specification