Simultaneous noncontact precision imaging of microstructural and thickness variation in dielectric materials using terahertz energy
First Claim
1. A process for measuring the velocity of terahertz electromagnetic radiation in a material sample without prior knowledge of the thickness of said sample, said terahertz electromagnetic radiation produced by a source, namely, a transceiver, spaced apart from said sample under test and propagated at the speed of light, c, in a medium located between said source, namely, said transceiver, and said sample, said sample residing on a substrate, comprising the steps of:
- emitting terahertz electromagnetic radiation from said source;
measuring the travel time of said terahertz electromagnetic radiation to and from said substrate without said sample present, t″
;
placing said sample on said substrate;
measuring the travel time of said terahertz electromagnetic radiation to and from said substrate with the sample present, t′
;
subtracting t″
from t′
to determine the transmission time difference with said sample present and without said sample present, Δ
t;
measuring the travel time of said terahertz electromagnetic radiation to and from said sample, 2t1;
determining the time difference between t′ and
the 2t1, 2τ
;
dividing Δ
t by 2τ and
determining the quotient;
subtracting said quotient from 1 to obtain a factor; and
multiplying said factor by, c, to determine the velocity of said terahertz electromagnetic radiation in said sample.
1 Assignment
0 Petitions
Accused Products
Abstract
A process for simultaneously measuring the velocity of terahertz electromagnetic radiation in a dielectric material sample without prior knowledge of the thickness of the sample and for measuring the thickness of a material sample using terahertz electromagnetic radiation in a material sample without prior knowledge of the velocity of the terahertz electromagnetic radiation in the sample is disclosed and claimed. The process evaluates, in a plurality of locations, the sample for microstructural variations and for thickness variations and maps the microstructural and thickness variations by location. A thin sheet of dielectric material may be used on top of the sample to create a dielectric mismatch. The approximate focal point of the radiation source (transceiver) is initially determined for good measurements.
39 Citations
20 Claims
-
1. A process for measuring the velocity of terahertz electromagnetic radiation in a material sample without prior knowledge of the thickness of said sample, said terahertz electromagnetic radiation produced by a source, namely, a transceiver, spaced apart from said sample under test and propagated at the speed of light, c, in a medium located between said source, namely, said transceiver, and said sample, said sample residing on a substrate, comprising the steps of:
-
emitting terahertz electromagnetic radiation from said source; measuring the travel time of said terahertz electromagnetic radiation to and from said substrate without said sample present, t″
;placing said sample on said substrate; measuring the travel time of said terahertz electromagnetic radiation to and from said substrate with the sample present, t′
;subtracting t″
from t′
to determine the transmission time difference with said sample present and without said sample present, Δ
t;measuring the travel time of said terahertz electromagnetic radiation to and from said sample, 2t1; determining the time difference between t′ and
the 2t1, 2τ
;dividing Δ
t by 2τ and
determining the quotient;subtracting said quotient from 1 to obtain a factor; and multiplying said factor by, c, to determine the velocity of said terahertz electromagnetic radiation in said sample. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17)
-
-
18. A process for measuring the thickness of a material using terahertz electromagnetic radiation in a material sample without prior knowledge of the velocity of said terahertz electromagnetic radiation in said sample, said terahertz electromagnetic radiation produced by a source, namely, a transceiver, spaced apart from said sample under test and propagated at the speed of light, c, in a medium located between said source, namely, said transceiver, and said sample, said sample residing on a substrate, comprising the steps of:
-
emitting terahertz electromagnetic radiation from said source; measuring the travel time of said terahertz electromagnetic radiation to and from said substrate without said sample present, t″
;placing said sample on said substrate; measuring the travel time of said terahertz electromagnetic radiation to and from said substrate with said sample present, t′
;subtracting t″
from t′
to determine the transmission time difference with said sample present and without said sample present, Δ
t;measuring the travel time of said terahertz electromagnetic radiation to and from said sample, 2t1; determining the time difference between t′ and
2t1, 2τ
;subtracting Δ
t from 2τ
to obtain a subtraction result;dividing said subtraction result by 2 to obtain a quotient; multiplying said quotient by, c, to obtain the thickness of said sample; and
,determining the thickness of the sample.
-
-
19. A process for simultaneously measuring the velocity of terahertz electromagnetic radiation in a material sample without prior knowledge of the thickness of said sample and for measuring the thickness of a material sample using terahertz electromagnetic radiation in a material sample without prior knowledge of the velocity of said terahertz electromagnetic radiation in said sample, said terahertz electromagnetic radiation produced by a source, namely, a transceiver, spaced apart from said sample under test and propagated at the speed of light, c, in a medium located between said source, namely, said transceiver, and said sample, said sample residing on a substrate, said sample residing on a substrate, comprising the steps of:
-
emitting terahertz electromagnetic radiation from said source; measuring the travel time of said terahertz electromagnetic radiation to and from said substrate without said sample present, t″
;placing said sample on said substrate; measuring the travel time of said terahertz electromagnetic radiation to and from said substrate with said sample present, t′
;subtracting t″
from t′
to determine the transmission time difference with said sample present and without said sample present, Δ
t;measuring the travel time of said terahertz radiation to and from said sample, 2t1; determining the time difference between t′ and
2t1, 2τ
;dividing Δ
t by 2τ and
determining the quotient;subtracting said quotient from 1 to obtain a factor; multiplying said factor by, c, to determine the velocity of said terahertz electromagnetic radiation in said sample; subtracting Δ
t from 2τ
to obtain a subtraction result;dividing said subtraction result by 2 to obtain a quotient; multiplying said quotient by, c, to obtain the thickness of said sample; evaluating, in a plurality of locations, said sample for microstructural variations and for thickness variations, and mapping said microstructural and thickness variations by location. - View Dependent Claims (20)
-
Specification