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Load lock and method for transferring objects

  • US 7,878,755 B2
  • Filed: 02/01/2008
  • Issued: 02/01/2011
  • Est. Priority Date: 03/11/2003
  • Status: Expired due to Fees
First Claim
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1. A system configured to transfer a substrate between a first environment and a second environment having different pressures and to keep the first environment and the second environment separated, comprising:

  • a load lock chamber located directly between the first and second environments that includes first and second substrate supports and first and second corresponding substrate displacement elements, the first and second substrate supports being positioned one above the other, each of the first and second substrate supports having a surface configured to receive a substrate;

    an intermediate plate coupled to an interior wall of the load lock chamber and located substantially between the first and second substrate supports, wherein the intermediate plate has first and second opposing surfaces that face the first and second substrate supports, respectively, and wherein the first and second opposing surfaces are parallel to the surfaces of the first and second substrate supports;

    an evacuation device configured to evacuate the load lock chamber; and

    a door configured to isolate the load lock chamber during evacuation.

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