Load lock and method for transferring objects

• US 7,878,755 B2
• Filed: 02/01/2008
• Issued: 02/01/2011
• Est. Priority Date: 03/11/2003
• Status: Expired due to Fees

• Current Assignee: ASML Netherlands BV (ASML Holding NV)
• Original Assignee: ASML Netherlands BV (ASML Holding NV)
• Inventors: Hoogkamp, Jan Frederik, Vugts, Josephus Cornelius Johannes Antonius, Livesey, Robert Gordon, Klomp, Albert Jan Hendrik, Franssen, Johannes Hendrikus Gertrudis
• Primary Examiner(s): Fox; Charles A
• Application Number:
  US12/068,072
• Publication Number:
  US 20080138177A1
• Time in Patent Office: 1,096 Days
• Field of Search: 414/217, 414/222.01, 414/935, 414/805, 414/806
• US Class Current: 414/805
• CPC Class Codes: G03F 7/7075 Handling workpieces outside exposure position, e.g. SMIF box
• CPC Class Codes: G03F 7/70858 Environment aspects, e.g. pressure of beam-path gas, temperature pollution aspects G03F7/70916
• CPC Class Codes: G03F 7/70975 Assembly, maintenance, transport or storage of apparatus
• CPC Class Codes: G03F 7/70991 Connection with other apparatus, e.g. multiple exposure stations, particular arrangement of exposure apparatus and pre-exposure and/or post-exposure apparatus; Shared apparatus, e.g. having shared radiation source, shared mask or workpiece stage, shared base-plate; Utilities, e.g. cable, pipe or wireless arrangements for data, power, fluids or vacuum

Abstract

A load lock is constructed and arranged to transfer a substrate between a first environment and a second environment and to maintain each of the first environment and the second environment therein. The load lock includes a load lock chamber provided with at least two mutually distinct substrate supports positioned one above the other. Each of the substrate supports includes a substrate displacement element. The load lock also includes an evacuation device constructed and arranged to evacuate the load lock chamber, and a door constructed and arranged to close the load lock chamber during evacuation and for opening the load lock chamber.

Claims

1. A system configured to transfer a substrate between a first environment and a second environment having different pressures and to keep the first environment and the second environment separated, comprising:

a load lock chamber located directly between the first and second environments that includes first and second substrate supports and first and second corresponding substrate displacement elements, the first and second substrate supports being positioned one above the other, each of the first and second substrate supports having a surface configured to receive a substrate;

an intermediate plate coupled to an interior wall of the load lock chamber and located substantially between the first and second substrate supports, wherein the intermediate plate has first and second opposing surfaces that face the first and second substrate supports, respectively, and wherein the first and second opposing surfaces are parallel to the surfaces of the first and second substrate supports;

an evacuation device configured to evacuate the load lock chamber; and

a door configured to isolate the load lock chamber during evacuation.

2. The system of claim 1, wherein the second environment has a lower pressure than the first environment, and wherein the load lock chamber further comprises a second evacuation device configured to evacuate the load lock chamber.

3. The system of claim 2, further comprising:

a substrate track system configured to deliver the substrate to or remove the substrate from the load lock chamber,

wherein the door faces the first environment and opens toward the substrate track system.

4. The system of claim 1, wherein the first and second substrate supports each comprise a support plate configured to individually support the substrate.

5. The system of claim 4, further comprising:

a positioning device configured to decrease a distance between the support plate and a ceiling plate of the load lock chamber prior to or during evacuation of the load lock chamber, and to increase the distance between the support plate and the ceiling plate prior to the substrate being removed from or delivered to at least one of the first and second substrate supports.

6. The system of claim 5, wherein the positioning device is configured to decrease a gas volume adjacent a surface of the substrate positioned on at least one of the first and second substrate supports.

7. The system of claim 1, further comprising:

a thermal treatment device configured to bring the substrate to a predetermined temperature or to equalize the temperature across the substrate.

8. A method for transferring objects between a first environment and a second environment having different pressures, the method using a load lock having a load lock chamber, the method comprising:

positioning a first object, coming from the first environment, on a first movable object support inside the load lock that is independently movable relative to a second movable object support inside the load lock;

closing the load lock in order to enclose the first object;

evacuating the load lock;

opening the load lock for connecting the load lock to the second environment; and

positioning a second object on the second movable object support inside the load lock and removing the first object from the first movable object support without requiring displacement of the first and second movable object supports during the positioning of the second object and the removing the first object.

9. The method of claim 8, further comprising:

closing the load lock in order to enclose the second object;

venting the load lock;

opening the load lock in order to connect the load lock to the first environment; and

removing the second object from the load lock.

10. The method of claim 8, wherein the positioning of the second object is performed before the removing the first object, and wherein both the positioning and the removing are performed with a same gripper.

11. The method of claim 8, further comprising:

decreasing a volume of gas adjacent the first object positioned on the first movable object support, prior to evacuation of the load lock.