System and method for monitoring operation of a pump

• US 7,878,765 B2
• Filed: 02/28/2006
• Issued: 02/01/2011
• Est. Priority Date: 12/02/2005
• Status: Active Grant

• Current Assignee: Entegris Incorporated
• Original Assignee: Entegris Incorporated
• Inventors: Cedrone, James, Gonnella, George
• Primary Examiner(s): Cuff; Michael
• Assistant Examiner(s): KASTURE, DNYANESH G
• Application Number:
  US11/364,286
• Publication Number:
  US 20070128047A1
• Time in Patent Office: 1,799 Days
• Field of Search: 417/2, 417/53, 417/44.2, 702138-140, 702/145, 702182-185
• US Class Current: 417/44.2
• CPC Class Codes: F04B 1/08 regulated by delivery pressure
• CPC Class Codes: F04B 13/00 Pumps specially modified to deliver fixed or variable measured quantities
• CPC Class Codes: F04B 2203/0209 Rotational speed
• CPC Class Codes: F04B 2205/01 Pressure before the pump inlet
• CPC Class Codes: F04B 2205/03 Pressure in the compression chamber
• CPC Class Codes: F04B 2205/04 Pressure in the outlet chamber
• CPC Class Codes: F04B 23/04 Combinations of two or more pumps
• CPC Class Codes: F04B 23/06 the pumps being all of reciprocating positive-displacement type
• CPC Class Codes: F04B 41/06 Combinations of two or more pumps
• CPC Class Codes: F04B 43/088 with two or more tubular flexible members in series F04B43/1133 takes precedence
• CPC Class Codes: F04B 49/06 Control using electricity regulating by means of floats actuating electric switches F04B49/04
• CPC Class Codes: F04B 49/065 and making use of computers
• CPC Class Codes: F04B 49/08 Regulating by delivery pressure
• CPC Class Codes: F04B 49/103 Responsive to speed
• CPC Class Codes: F04B 51/00 Testing machines, pumps, or pumping installations

Abstract

Systems and methods for monitoring operation of a pump, including verifying operation or actions of a pump, are disclosed. A baseline profile for one or more parameters of a pump may be established. An operating profile may then be created by recording one or more values for the same set of parameters during subsequent operation of the pump. The values of the baseline profile and the operating profile may then be compared at one or more points or sets of points. If the operating profile differs from the baseline profile by more than a certain tolerance an alarm may be sent or another action taken, for example the pumping system may shut down, etc.

Claims

1. A method for controlling fluid pressure in a multiple stage pump comprising:

accessing a baseline pressure profile for a known good dispense cycle;

operating a feed pump, a dispense pump and a set of valves to perform a new dispense cycle including a fill segment and a dispense segment;

continually taking pressure measurements during the dispense cycle of fluid in a dispense chamber using a pressure sensor disposed to measure pressure in the dispense chamber;

creating a first operating profile from the pressure measurements taken during the new dispense cycle;

during one or more of the fill segment or the dispense segment of the new dispense cycle, comparing each of one or more values associated with the first operating profile with a corresponding value associated with the baseline profile to determine if each of the one or more values associated with the first operating profile is within a tolerance of the corresponding value associated with the baseline profile; and

during one or more of the fill segment or the dispense segment, if the one or more values associated with the first operating profile is not within tolerances, generating an alarm;

wherein operating the feed pump, dispense pump and set of valves to perform the fill segment comprises;

operating the feed pump to reduce a volume of a feed chamber at a first predetermined rate;

opening a barrier valve to allow a fluid in the feed chamber to enter said dispense chamber while keeping an outlet valve closed so that none of the fluid entering the dispense chamber is dispensed;

taking pressure measurements of the fluid in the dispense chamber using the pressure sensor;

determining whether a first pressure measurement is greater than a predetermined pressure;

in response to the first pressure measurement being greater than said predetermined pressure, operating said dispense pump to increase a volume of the dispense chamber at a second predetermined rate;

taking a second pressure measurement while the dispense pump is operating to increase the volume of the dispense chamber;

determining whether the second pressure measurement is greater than a first threshold or less than a second threshold;

in response to determining that the second pressure measurement is greater than the first pressure threshold, operating the feed pump at a decreased speed;

in response to determining that the second pressure measurement is less than the second threshold, operating the feed pump at an increased speed;

determining whether the operation of the dispense pump has caused the volume of the dispense chamber to reach a predetermined volume;

in response to determining that the volume of the dispense chamber has not reached the predetermined volume, repeating the method from the step of measuring the second pressure; and

in response to determining that the volume of the dispense chamber has reached the predetermined volume, stopping the operation of the feed pump and the dispense pump.

2. The method of claim 1, wherein the first threshold is the predetermined pressure.

3. The method of claim 2, wherein the second threshold is the predetermined pressure.

4. The method of claim 1, wherein the fluid has a viscosity of less than 5 centipoise.

5. The method of claim 1, further comprising;

closing the barrier valve;

opening the outlet valve; and

operating the dispense pump to dispense fluid onto a wafer.

6. The method of claim 1, wherein operating the feed pump comprises operating a stepper motor.

7. The method of claim 6, wherein operating the dispense pump comprises operating a permanent-magnet synchronous motor.

8. The method of claim 1, further comprising filtering the fluid through a filter between the feed pump and the dispense pump.

9. A multiple stage pump comprising:

a feed pump comprising;

a feed chamber;

a first diaphragm movable in the feed chamber;

a first lead screw to move the first diaphragm;

a first motor coupled to the first lead screw to rotate the first lead screw;

a dispense pump fluidly coupled to the feed pump, the dispense pump comprising;

a dispense chamber;

a second diaphragm movable in the dispense chamber;

a second lead screw to move the second diaphragm;

a second motor coupled to the second lead screw to rotate the second lead screw;

a filter disposed in a fluid flow path between the feed pump and the dispense pump;

an inlet valve;

an isolation valve;

a barrier valve;

an outlet valve;

a pressure sensor positioned to measure pressure in said dispense chamber; and

a pump controller comprising a processor and a tangible, non-transitory computer readable medium storing a set of instructions executable to cause the controller to;

access a baseline pressure profile for a known good dispense cycle;

operate the multiple stage pump to perform a new dispense cycle including a fill segment and a dispense segment;

continually take pressure measurements during the dispense cycle of fluid in said dispense chamber using the pressure sensor;

create a first operating profile from the pressure measurements taken during the new dispense cycle;

during one or more of the fill segment or the dispense segment of the new dispense cycle, compare each of one or more values associated with the first operating profile with a corresponding value associated with the baseline profile to determine if each of the one or more values associated with the first operating profile is within a tolerance of the corresponding value associated with the baseline profile; and

during one or more of the fill segment or the dispense segment, if the one or more values associated with the first operating profile is not within tolerances, generating an alarm;

wherein operating the multi-stage pump to perform the fill segment comprises;

operating the feed pump to reduce a volume of said feed chamber at a first predetermined rate;

opening said barrier valve to allow a fluid in the feed chamber to enter said dispense chamber while keeping said outlet valve closed so that none of the fluid entering the dispense chamber is dispensed;

taking pressure measurements of the fluid in the dispense chamber using the pressure sensor;

determining whether a first pressure measurement is greater than a predetermined pressure;

in response to the first pressure measurement being greater than said predetermined pressure, operating a dispense pump to increase a volume of the dispense chamber at a second predetermined rate;

taking a second pressure measurement while the dispense pump is operating to increase the volume of the dispense chamber;

determining whether the second pressure measurement is greater than a first threshold or less than a second threshold;

in response to determining that the second pressure measurement is greater than the first pressure threshold, operating the feed pump at a decreased speed;

in response to determining that the second pressure measurement is less than the second threshold, operating the feed pump at an increased speed;

determining whether the operation of the dispense pump has caused the volume of the dispense chamber to reach a predetermined volume;

in response to determining that the volume of the dispense chamber has not reached the predetermined volume, repeating the method from the step of measuring the second pressure; and

in response to determining that the volume of the dispense chamber has reached the predetermined volume, stopping the operation of the feed pump and the dispense pump.

10. The multiple stage pump of claim 9, wherein the fluid has a viscosity of less than 5 centipoise.

11. The multiple stage pump of claim 9, wherein:

the pump controller is further operable to;

close the barrier valve after the dispense chamber has reached the predetermined volume;

open the outlet valve; and

operate the dispense pump to dispense fluid from the multiple stage pump.

12. The multiple stage pump of claim 9, wherein the first motor is a stepper motor.

13. The multiple stage pump of claim 12, wherein the second motor is a permanent-magnet synchronous motor.

14. The multiple stage pump of claim 9, wherein the first threshold is the predetermined pressure.

15. The multiple stage pump of claim 14, wherein the second threshold is the predetermined pressure.

16. A computer program product comprising a tangible, non-transitory computer readable medium storing instructions executable to perform a method of controlling a multiple stage pump, the method comprising:

accessing a baseline pressure profile for a known good dispense cycle;

operating a feed pump, a dispense pump and a set of valves to perform a new dispense cycle including a fill segment and a dispense segment;

continually taking pressure measurements during the dispense cycle of fluid in a dispense chamber using a pressure sensor disposed to measure pressure in the dispense chamber;

creating a first operating profile from the pressure measurements taken during the new dispense cycle;

during one or more of the fill segment or the dispense segment of the new dispense cycle, comparing each of one or more values associated with the first operating profile with a corresponding value associated with the baseline profile to determine if each of the one or more values associated with the first operating profile is within a tolerance of the corresponding value associated with the baseline profile; and

during one or more of the fill segment or the dispense segment, if the one or more values associated with the first operating profile is not within tolerances, generating an alarm;

wherein operating the feed pump, dispense pump and set of valves to perform the fill segment comprises;

operating the feed pump to reduce a volume of a feed chamber at a first predetermined rate;

opening a barrier valve to allow a fluid in the feed chamber to enter said dispense chamber while keeping an outlet valve closed so that none of the fluid entering the dispense chamber is dispensed;

taking pressure measurements of the fluid in the dispense chamber using the pressure sensor;

determining whether a first pressure measurement is greater than a predetermined pressure;

in response to the first pressure measurement being greater than said predetermined pressure, operating said dispense pump to increase a volume of the dispense chamber at a second predetermined rate;

taking a second pressure measurement while the dispense pump is operating to increase the volume of the dispense chamber;

determining whether the second pressure measurement is greater than a first threshold or less than a second threshold;

in response to determining that the second pressure measurement is greater than the first pressure threshold, operating the feed pump at a decreased speed;

in response to determining that the second pressure measurement is less than the second threshold, operating the feed pump at an increased speed;

determining whether the operation of the dispense pump has caused the volume of the dispense chamber to reach a predetermined volume;

in response to determining that the volume of the dispense chamber has not reached the predetermined volume, repeating the method from the step of measuring the second pressure; and

in response to determining that the volume of the dispense chamber has reached the predetermined volume, stopping the operation of the feed pump and the dispense pump.

17. The computer program product of claim 16, wherein the first threshold is the predetermined pressure.

18. The computer program product of claim 17, wherein the second threshold is the predetermined pressure.

19. The computer program product of claim 16, wherein operating the feed pump comprises operating a stepper motor.

20. The computer program product of claim 16, wherein operating the dispense pump comprises operating a permanent-magnet synchronous motor.