Shower plate, plasma processing apparatus, and product manufacturing method
First Claim
Patent Images
1. A shower plate having a plurality of ejection holes adapted to eject a gas, wherein:
- each ejection hole has a portion, on the side where the gas flows into the hole, having a width which is more than 0.5 mm and is not more than 5 mm and a portion, on the side where the gas flows out of the hole, having a width which is not less than 0.02 mm and is not more than 0.5 mm,the number y of gas ejection holes per unit area is given by a quadratic curve of a distance x from a center of the shower plate, andthe quadratic curve is y=0.0173x2+5.3574 x+71.517.
1 Assignment
0 Petitions
Accused Products
Abstract
A system for processing a substrate uniformly by increasing the number of gas discharge holes being arranged per unit area of a shower plate as receding from the center of the shower plate or increasing the radii of the gas discharge holes as receding from the center of the shower plate thereby making the plasma excitation gas flow uniform.
16 Citations
3 Claims
-
1. A shower plate having a plurality of ejection holes adapted to eject a gas, wherein:
-
each ejection hole has a portion, on the side where the gas flows into the hole, having a width which is more than 0.5 mm and is not more than 5 mm and a portion, on the side where the gas flows out of the hole, having a width which is not less than 0.02 mm and is not more than 0.5 mm, the number y of gas ejection holes per unit area is given by a quadratic curve of a distance x from a center of the shower plate, and the quadratic curve is y=0.0173x2+5.3574 x+71.517. - View Dependent Claims (2, 3)
-
Specification
-
- Resources
Litigation Campaign Assessment
Thank you for your request. You will receive a custom alert email when the Litigation Campaign Assessment is available.
×
-
Current AssigneeFoundation for Advancement of International Science
-
Original AssigneeFoundation for Advancement of International Science
-
InventorsHirayama, Masaki, Ohmi, Tadahiro, Goto, Tetsuya
-
Primary Examiner(s)Cleveland; Michael
-
Assistant Examiner(s)Chen; Keath T
-
Application NumberUS10/584,340Publication NumberTime in Patent Office2,321 DaysField of Search156/345.33, 156/345.34, 118/715US Class Current156/345.33CPC Class CodesC23C 16/45565 Shower nozzlesH01J 37/3244 Gas supply meansH01J 37/32449 Gas control, e.g. control o...
